Series AK1000 1) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.6 lbs (1.18 kg) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.
10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double
C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.
-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.
13 95 46 118 30 25 to 1400 1/3.5 stroke 50 28 15 52 55 M10 x 1.25 76 85 52 10 27 19 11 43 35 1/2 46 142 14 18 115 58 145 30 25 to 1400 63 30 20 55 65 M12 x 1.5 90 98 63 10 27 19 14 43 35 1/2 52 148 18 20 132 65 165 35 25 to 1500 80 35 20 80 65 M16 x 1.5 110 118 80 11 22 22 16 44 44 3/4 65 166 18 24 155 87 190 35 25 to 1800 1/4 stroke 100 39 15 100 80 M18 x 1.5 135 150 102 11 22 22 18 44
HRX-OM-W038 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety
Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12 13 14 15 9 12 13 14 15 11 PWR
8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109 (Double) 122 (3 Position) 300 VFR (Lead wire length) Cover diameter 1.6 Cross section 0.34mm2 VP7 VP4 65.5 36.5 31.2 17 62 X 5 1 P 3 R1 R2 R1 R2 5 1 P 3 (33) 26 13.8 15.2 8 VQ PE port 4-Rc(PT)1/4 R1, R2(EXH) port 2-Rc(PT)1/4 P(SUP) port 2-M5 X 0.8 External pilot port
10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard condition.
Nominal filtration rating: 30 m, 10 pcs. in 1 set 10 pcs. in 1 set Vacuum pressure switch assembly Manifold base assembly Refer to Manifold in How to Order the Product on page 3 for change in the number of stations.
.) 2 to 16 L/min 5 to 40 L/min Port size Calibration certificate (Only flow sensor) Rated flow range Symbol Port size Nil None 10 to 100 L/min 50 to 250 L/min 04 20 40 11 21 A With calibration certificate 03 04 06 10 12 14 $ $ $ 3/8 1/2 3/4 1/1 The certificate is written in both English and $ $ Flow adjustment valve Japanese.
1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA F E G PF2M701/702/705/710/750/711/721 PF2M725 Voltage output (0 to 10 V) 1 0 V 0.10 V 0.12 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.
38 10 . 40 10-1 . 40 10-2 . 42 1 , 1. 2. 3.
mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output
35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x
Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.
-15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 1 9h9 M3 x 0.5 0.88 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 6 3 3 12h9 2 2 2 1.5 4 4 M4 x 0.7 2.1 M4 x 0.7 2.1 M4 x 0.7 2.1 8 8 8 8 8 14h9 5 5 M5 x 0.8 4.3 M5 x 0.8 4.3 M5 x 0.8 4.3 10 2 10 10 10 10 16h9 1 9h9 3 3 3 M3 x 0.5 0.88 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 3 3 12h9 How to Locate Finger and Attachment How to Mount
1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy
40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (
: L Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 -1 10-1 Minimum Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 5 105 Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum