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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2017 SMC Corporation All Rights Reserved. EX-OMT0014-A

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes). 1.0 to 1.2 Yellow ZS-28-C-1 Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.

During the zero clear operation, pressure above 10%F.S. has been applied. After 3 s, the mode will reset to the measurement mode. The zero clear range can vary 1 digit with individual product differences. Perform zero clear operation again after restoring the applied pressure to an atmospheric pressure condition.

L/min. or CFM(ft3/min.) x 10-2 are the selectable display units. To use for flow rate indication, select the sensor and units before setting the functions [F1], [F2], [F4]. The set values for [F1], [F2] and [F4] will be reset when the flow indication setting is changed.

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

Butyl acetate concentration 10% or less Nitric acid Pure water Caution Sodium hydroxide x Super pure water Strip the lead wire as shown. Do not cut the insulator. Do not touch the terminals and connectors while the power is on. Otherwise electric shock, malfunction or damage to the product can result.

Temperature lower limit under The fluid temperature is below -10 oC. Rise the fluid temperature. [ dtH2] Delay time setting at ON [ 0.00] 0.00 s The function number is increased and decreased by the UP and DOWN buttons.

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) and other safety regulations. 04 Equivalent to M3 (L=6) 20 0.04 to 0.05 Nm 40 Equivalent to M4 (L=10) 0.09 to 0.10 Nm Element Description This unit supplies the fluid from the supply side main piping to the application.

[F20] Setting of external input Accumulated flow external reset Free range analogue output for instantaneous flow: OFF * (Analogue output for fluid temperature) Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. Avoid any sealing tape getting inside the piping. Ensure there is no leakage from loose piping.

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the outline dimension drawing for mounting hole size. Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more detailed information.

Card URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Rev.A Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2011 SMC Corporation All Rights Reserved

ON delay time ON point delay time of the switch output can be set. 0.00 second Measurement mode Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. OFF delay time OFF point delay time of the switch output can be set. 0.00 second Installation Use the product within the specified operating pressure range and temperature range.

During the zero adjustment, potential exceeding the default setting value by 10%F.S. has been applied. : After approx. 1s measurement mode will return automatically. Slight displacement occurs depending on individual product differences and the sensor adjustment condition at zero adjustment.

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

(Agoura Hills) 30497 Canwood Street Suite 101 Agoura Hills, CA 91301 Tel: (818) 865 8740 Fax: (818) 865 8742 SMC Pneumatics Inc. (Portland) 14107 NE Airport Way Portland, OR 97230 Tel: (503) 252 9299 Fax: (503) 252 9253 SMC Pneumatics Inc. (Denver) 4910 Fox Street Unit C Denver, CO 80216 Tel: (303) 293 9322 Fax: (303) 293 9376 SMC Pneumatics Inc.

ASME compliant and TSSA registered 52 60 71 74 80 86 85 85 87 99 101 120 118 120 Up-flow drying and down flow purging ensure desiccant remains stable during tower depressurization and purging Removable stainless steel wedgewire style desiccant retainers P/A's pneu alpha programmable controller Port size 1 1/2" NPT 1 1/2" NPT 2 1/2" NPT 3" Flange 3" Flange 4" Flange 4" Flange 6" Flange

The alarm currently generated and the alarm historys for each axis are saved together. 10 No.SFOD-OMT0012-A (1-1-1-3) Software Exit Completing the setting software.