Slit Valve The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
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Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting
Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: NPTF, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: NPTF, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 220VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Surge Suppressor, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 3/4, Thread: NPTF, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1/2, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): -0.1 to 0.9,
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPTF, Port Size: 1/2, Pressure Rating(MPa): -0.1 to 0.9,
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 3/4, Pressure Rating(MPa): -0.1 to 0.9,