Air Slide Table

For details, refer to the MXQR Operation Manual. 2 7 J I 3.5 6.5 3.5 6.75 3 depth 3 +0.03 0 3 depth 3 +0.03 0 4 N x M3 x 0.5 thread depth 5 6.5 3.5 0.7 16 1 17 15 36 24 16 1 32 12 F 5 4 x M3 x 0.5 thread depth 4 10 -1 x F 2 N 12 3 x M4 x 0.7 thread depth 6 M 6 KA 14.6 7 3.8 NA x M3 x 0.5 thread depth 3.5 K 14.6 Bottom view of MXQR8-30 7 3.8 14 21.2 0.3 27 23 6 4 23 Z ZZ (NN-1) x H G H 13.5

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Max. 5.75 2-M3 x 0.5 2-M4 x 0.7 depth 8 6-M3 x 0.5 depth 4 Top ported: MSUB1-DE B port A port 2-M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Series 11-MXJ Air Slide Table

Operating port 2 x M3 x 0.5 I J Vacuum port M3 x 0.5 3.5 (Plugged when the product is a symmetric type.) 4 3 8 K 4 x M3 x 0.5 thread depth 5.5 Note 2) Note 3) 2 x M3 x 0.5 thread depth 3.5 17 5 Note 1) When using a positioning pin, use a stepped positioning pin. For details, please consult with your SMC sales representative.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth

VZ5000

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

max. m1, m2, m3 max.

Manifold Specifications

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R 3.5 2-M2.5 x 0.45 x 6l 4-M3 x 0.5 (Through-hole) 6 7 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5l, 2-M3 x 0.5 (Hexagon bolt) (Hexagon nut) 4-M3 x 0.5 (Through-hole) W (10) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4 5 2 3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

Rotary Table/Vane Style Series MSU

MSUB1 (Single vane) MSUB1-S/SE 4 x M3 x 0.5 depth 5 2 x 4.5 through 2 x M4 x 0.7 depth 8 Long groove depth 5 (Positioning pin hole) 2 x 4.5 through +0.025 0 3 x 3H9 depth 5 Adjustment bolt 2 x 4.5 through Adjustment: Max. 5.75 A port B port 2 x M3 x 0.5 2 x M4 x 0.7 depth 8 Top ported: MSUB1-SE A port B port 2 x M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

Electric Grippers

LEHS32 LEHS40 LEHS10(L) LEHS20(L) LEHS32 LEHS40 M3 x 0.5 0.9 M3 x 0.5 0.9 5. Do not use the product in applications where excessive external force (including vibration) or impact force is applied to it. It may lead to breakage or galling, which causes operation failure. Do not apply impact and vibration outside of the specifications.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: X, Z The maximum dimension L2 is, as a rule, twice the thread size.

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Body through hole MI W S CEP1 CE1 Max. tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt CE2 M2.5 x 0.45 0.5 ML2B M3 x 0.5 0.88 C J G5-S M5 x 0.8 4.3 CV M6 x 1 7.3 MVGQ M8 x 1.25 17.5 Max. tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 CC M3 x 0.5 0.88 Caution RB M3 x 0.5 0.88 1.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL

CRB1/Size: 10, 15, 20, 30

R Q2 B P C F(h9) D G1 G2 J K L M N Q1 E(g6) Q3 Model A 90 180 270 M5 M3 CRB1BW10-lS CRB1BW10-lSE CRB1BW15-lS CRB1BW15-lSE CRB1BW20-lS CRB1BW20-lSE CRB1BW30-lS CRB1BW30-lSE 3.4 (5.5) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 M3 (6) 0 0.036 15 24 8 0.004 0.012 9 14 3 1 5 9 0.5 29 4 M3 M3 (5) M5 M3 3.4 (6) M3 (10) 0.004 0.012 0 0.043 20 29 9 12 18 5 4 1.5 6 10 0.5 34 M3 M4 (7.5) 4.5

Escapements Series MIW/MIS

Body through hole Max tightening torque (Nm) Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 Bolt M2.5 x 0.45 0.5 M3 x 0.5 0.88 M5 x 0.8 4.3 M6 x 1 7.3 M8 x 1.25 17.5 Max tightening torque (Nm) Bolt Model MIW8 MIS8 MIW12 MIS12 MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 M3 x 0.5 0.88 Caution M3 x 0.5 0.88 1.