LA-OMT0056

A B 18 - 43 Timing diagram (Example) The figure shows the timing diagram of operation for the selected step data input type and the PLC parallel input/ output signals used when power is supplied.

Mist Separator

Disassembly Drawing 18 12. Dimensions 19 -1- Mist Separator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Micro Mist Separator

Disassembly Drawing 18 12. Dimensions 19 -1- Micro Mist Separator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

SI unit for CC-Link

No.EX-OME0011-H PRODUCT NAME SI unit for CC-Link MODEL / Series / Product Number EX140-SMJ1 Series Table of Contents Safety Instructions 2 Model Indication and How to Order 7 Summary of Product parts 7 Definition and terminology 7 Mounting and Installation 8 Communication wiring 8 Power supply wiring 10 Settings 10 Maintenance 14 Troubleshooting 15 Specifications 18 Specifications 18 Dimensions

PSxx-OMG0001CN

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Compact Guide Cylinder

Construction 12 13 18. Auto Switch 18-1. Applicable auto switches 18-2. Auto switch proper mounting position (detection at stroke end) and Its mounting height 14 18-3. Minimum mountable stroke for a cylinder with auto switch(es) 18-4. Auto switch operating range 18-5.

SI Unit for Vacuum Manifold

(M3 screw) Refer to Section 2.3. 5 LED display LED display to indicate the status of the SI Unit. Refer to Section 7.1. 6 Product information label Information label to indicate an information of the SI Unit such as MAC address or serial No. etc.. Fig. 1-1.

Flow sensor

Part number Description Remarks ZS-36-A1 1 station: 2 L-type brackets With mounting screws (M3 x 15 L) 2 pcs. ZS-36-A2 2 station: 2 L-type brackets With mounting screws (M3 x 25 L) 2 pcs. ZS-36-A3 3 station: 2 L-type brackets With mounting screws (M3 x 35 L) 2 pcs. ZS-36-A4 4 station: 2 L-type brackets With mounting screws (M3 x 45 L) 2 pcs.

LEF-OM007xx

LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

pa

Combination screw M3 Tightening torque 0.5 to 0.6 Nm Combination screw M3 A Conduit terminal View A-A (Internal connection diagram) G + mark mark + 1 2 Series VC A Conduit When used as an IP65 equivalent, use seal (Part no. VCW20-156) to install the wiring conduit. Also, use the tightening torque below for the conduit.

AFF

(MPa) Pressure drop (MPa) Max. flow line Max. flow line HA AT ID Air flow rate (m3/min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) AMG AFF220A 4 1 2 AFF11B B B AFF 0.1 MPa Max. flow line AM 0.3 MPa Misc.

AMD

(MPa) Pressure drop (MPa) 0.1 MPa 0.1 MPa Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 1 2 AMD450 AMD850 1 2 1 B B 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line 0.1 MPa 0.1 MPa Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 14-20-24 4 Micro Mist Separator Series AMD Construction AMD150 to AMD650

EX260-SEC-A_eng

(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

EX260-SDN_eng

BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.

EX260-SPR-A_eng

M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Exhaust Cleaner Series AMC

1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

With Factory Installed

Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

Unit Manifold Valve

Tightening the threaded portion of an M3 fitting For KJS02-M3 (one-touch fitting), tighten it with a tightening tool by approx. 1/6 rotation after screwing it in by hand. Screwing the fitting in too far will cause air leakage due to thread breakage and gasket deformation. Screwing the fitting not far enough will also cause air leakage due to the loose screw. 1.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.