PA300/500/700

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With gasket, mounting screw) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 5-5-21 10 Series VPA300/500/700 Dimensions Common exhaust: VV3PA3-41Station 1-02 69.4 (Mounting hole) 2-6.5 24 NC NO 13.5 (R port) Rc 1/4 PA 26.7 65.6 58.6 3(R) 27 50 65.6 1(P) 26.7 PA (Pitch) (P port) Rc 1/4 Rc 1/8 (PA port) 27.5 28 70.4 L1 L2 7.5

Hygienic Design Cylinder Series HYG

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .

05-hyg-e

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .

WRF100

Switch mounting bracket Note 2) 0.2 25 25 13 Fulcrum 12 12 20 10 10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Suction Guard (Produced upon receipt of order) FHG Series

25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model AK 1/8" ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 22.2 28.6 25.8 29.4 11.7 28.3 10 17.5 7.8 9.6 25 5/32" ASD230F-U10/32-03 9.3 13 ASS 20.7 7.8 16.5 15 3/16" ASD230F-U10/32-05 10-32 UNF 8 9.6 10 11.7 28.3 25.5 28.6 25.8 25 22.2 35.2 23.3 11.4 13.5 13 1/4" ASD230F-U10/32-07 32.6 12 ASR 30 16.5 14 3/16" ASD330F-N01-05S 39.5 39.6 23.9 11.6 34.6 17

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

ZK2-C

DC24 V10% DC24 V10% DC(+) DC(-) 8 / / 9 () 10 / 5 m / 11 10 1015 "-M" ( ) (kPaMPa) "-M" 12 SI kPa,MPa -49NO.ZK2-OM00801-B No. 13 14 A () 15 () / ( ) () -50NO.ZK2-OM00801-B 80mA 3.5 F.S. 1 1 F.S. -51NO.ZK2-OM00801-B 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S

Rotary Table: High Precision Type

Specifications Model MSUA1 MSUA3 MSUA7 MSUA20 Vane Type Single vane Rotating angle *1) 90 o 180 o 90 o 180 o 90 o 180 o 90 o 180 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o Fluid Air (Non-lube) Proof pressure 1.05 MPa 1.5 MPa Ambient and fluid temperature 5 to 60 oC Operating pressure range 0.2 to 0.7 MPa 0.15 to 0.7 MPa 0.15 to 1.0 MPa Rotation time adjustment range 0.07 to

JXCx-OMT0061CN

CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Servo Motor Controller (24 VDC)

) Side (10) No.

Lubricator

Bowl Assembly Specifications 10-14 7. Assembly of Optional Parts 15 8. Operation and Adjustment 16-19 8-1. Adjustment of Dripping Amount 16 8-2. Lubrication 17-18 8-3. Oil Discharge from the Product with Drain Cock 19 9. Trouble Shooting 20 10. How to Replace the Components 21-30 10-1. Bowl Assembly Replacement 21-23 10-2. Bumper Retainer Assembly Replacement 24-27 10-3.

ISO Standard Hydraulic Cylinder ø 40, ø 50, ø 63, ø 80, ø 100 CHSD Series

Standard Stroke Bore size (mm) Standard stroke (mm) 40 50 63 80 100 25 to 800 25 to 800 25 to 800 25 to 800 25 to 1000 Theoretical Output OUT IN Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 3.5 10 7 OUT 1256 4396 8792 12560 40 22 IN 876 3066 6132 8760 OUT 1963 6871 13741 19630 50 28 IN 1347 4715 9429 13470 OUT 3117 10910 21819 31170 63

Mist Separator

Construction / Options / Replacement parts 10 6. Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.