sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

sResponse timeHysteresisPower supply voltageResistancePF2W740Water3.5 to 45 l/min3.5 to 45 l/min5 to 40 l/min0.5 l/min0.5 l/pulse0 to 50C?5% F.S. or less?3% F.S. or less?5% F.S. or less (0 to 50C, based on 25C)70 mA or less700 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lOperating: 0 to 50C, Stored: ?

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 39 12.9 R 1/4 23 43.3 48.3 21 19 42.8 37.8 AS331FG-02-10 AS231FG-N02-11 32.6 53.9 46.5 21 31 43.7 38.7 20.2 10 18.5 3/8" 17.9 67 40 23 16.2 AS331FG-02-12 AS331FG-N02-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 42.8 37.8 25.2 45

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

LX

For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 1.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 0.7 0.6 0.5 0.4 0.2 0.2 0.1 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 1.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 0.6 0.7 0.4 0.5 0.2 0.2 0.1 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

1.1

or less 50 or less 50 or less 70 or less 50 or less 30 or less 0.3 or less 0.1 or less Should not be detected. 0.1 or less 0.3 or less 4.0 or less Standard item 1.

CV/MVGQ

(n 4) 2 (n 2) 2 15 + 50 n = 2, 4, 6, 8 (n 4) 2 110 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8, Different sides MQQ M n Same side RHC 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides MK(2) 2 Same side (n 2) 2 20 + 50 n = 2,

Thermo-chiller

) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4 to 11.0 gal/min

ZPT/ZPX

127 202.5 326.6 510.3 797.3 Misc. 60 75.6 118 301.4 471 736 187 55 69.3 108 276.3 431.8 674.6 171.4 50 63.0 98.0 155.8 251.2 392.5 613.3 45 56.7 88.2 140.2 226.1 353.3 552 40 50.4 78.4 124.6 201 314 490.7 Precautions 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(-L) PF2M750(-L) 10 L/min 25 L/min 0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 11.0 0 5 10 15 20 25 30 35 40 45 50 55 0.0 2.5 5.0 7.5 10.0 12.5 15.0 17.5 20.0 22.5 25.0 27.5 Flow [L/min] Flow [L/min] Flow [L/min] 30 70 50 0 350 750 70 50 30 0 350 750 70 50 30 0 350 750 Applied pressure [kPa] Applied pressure [kPa] Applied pressure [kPa] 200 L/min PF2M721(-L) PF2M711(-L) 100 L/min 0 10 20

33

/60 Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230 VAC (50/60 Hz) Triple control Compressor, fan and electronic control valve can be controlled depending on the heat load from the user s equipment.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

VQ5000

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

Thermo-con/Rack Mount Type

With feet and no rack mounting brackets With flow switch High-pressure pump mounted HECR 008-A 800 W 1.4 kW Tap water 0.01 to 0.03C Ethylene glycol 20% 010-A 1 kW 2 kW Single-phase 200 to 240 VAC (50/60 Hz) (UL Standards) Water-cooled Single-phase 100 to 240 VAC (50/60 Hz) New New HECR 008-W 800 W 1.4 kW Peltiertype watercooled 012-W 1.2 kW 2 kW Single-phase 200 to 240 VAC (50/