SMC Corporation of America
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OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 3 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value.

Point table No. selection 1 (RYnA) Point table No. selection 2 (RYnB) Point table No. selection 3 (RYnC) Point table No. selection 4 (RYnD) Point table No. selection 5 (RYnE) Point table No. selection 6 (RY(n2)3) Point table No. selection 7 (RY(n2)4) Point table No. selection 8 (RY(n2)5) Turn RYnA to RYnE, (RY(n2)3) to (RY(n2)5) ON / OFF.

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

= Input block stations (Station n2) Light/Surge voltage suppressor L2 = L1 10.5 L3 = 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 60 45.5 10 11.8 (for DIN rail mounting) (7.5) L1: DIN rail overall length (mm) Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Input block Stations (n2) 0 1 2 3 4 5 6 7 8 185.5 210.5 223 248

Nitrogen gas (N2) Freon 11, 113, 114, Turbine oil , Hydraulic fluid Conduit Carbon dioxide (CO2) (0.7 MPa max.)

polyurelhane tube Seal Kit-How to Order RSory-P"t [,"; Hri'lj,ffL 20 32 40 50 Construction/parts list Fixed mounting heisht SgfieS RSO Ooubfe acling . double acling wift spring . rolle( rd end Lever rod end wi(h buillin shock absorber (only 032, 440, d6o) d20 032.d40.C60 Round bar fod end type (D) Non rotaling rod end type (K) Single acting/roller rod end Q20 Only 1 roller is provided for 032 N2

Only air, N2, are applicable. [ H_1] Hysteresis of OUT1 : The outputs will continue to operate during setting. : If a button operation is not performed for 30 seconds during the setting, the display will flash.

Only air, N2, are applicable. Flow direction Arrow Default setting Turn the power off and on again. If the failure cannot be solved, contact SMC. An internal data error has occurred. Function (Main display) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Only air, N2, are applicable. Flow direction: Left Right Flow direction: Right Left Default setting Rotation of the display Function (Main display) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. (2) Press the or button to change the set value.

Symbol Nil N T F Thread type Rc NPT NPTF G VCW23-5G-2Q .. 5 sets Valve part no. (Stations 1 to 5) Series 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side.

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Fluid Vortex generator Vortex detector Temperature compensation element Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital

to 4 Valve size 5 to 7 Electrical entry Symbol Table (1) Applicable Fluids VNAA (Valve material: NBR seal) VNAB (Valve material: FKM seal) VNAC (Valve material: EPR seal) GS Grommet with surge voltage suppressor G Grommet Model E Grommet terminal Air (Standard, Dry) Argon Helium EZ Grommet terminal with light/surge voltage suppressor Carbon dioxide (CO2) (Less than 0.7 MPa) Nitrogen gas (N2

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Only air, N2, are applicable. Flow direction: Left Right Flow direction: Right Left Temperature exceeding the upper limit of the set temperature range is applied. Reset applied temperature to a level within the settable temperature range. Temperature below the lower limit of the set temperature range is applied.

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

N2 purge port Option Cooling capacity: Max.30 kW 1. Normal operation Option Customers machine Circulating fluid outlet Up to 30 kW cooling capacity achieved.