EX120/121/122

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 1 5 1 0 1 10 CE compliant Series D-sub connector kit with cable (3 m) VQ1000 VQ2000 1 2 CE compliant Nil Q 10-VV5Q11-09C6FU2 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 1 5 1 0 1 10 CE compliant Series D-sub connector kit with cable (3 m) VQ1000 VQ2000 1 2 CE compliant Nil Q 10-VV5Q11-09C6FU2 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 2 setsValve part no. (Stations 7 to 8) 1 setBlanking plate part no.

HRX-OM-W002

BL WH WH WH YL YL OR OR BK RD RD RD BL BK BK 2/2 1/2 1/2 2/2 3 3 (CN7) (CN2) (CN3) 2 2 1 1 (CN5) (CN1) (CN1) 22 23 25 26 27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board

Valve Single Unit

1 U side D side Valve stations Note Stations Symbol 02 2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

KJ

17.5 15.5 2.5 1 8 1 4 1 8 10.4 10 18 16 3 5 32 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 Connection thread 1 2 3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

CRBU

(14 X) to (X 1) 10 (18 X ) to (X 1.5) 10 (20 X) to (X 1.5) 12 (22 X) to (X 2) X 1 X 1.5 X 1.5 X 2 The "" symbol indicates 0.5mm minimum, L1 is the standard flat.

Compact Cylinder Series CQS

2 (4.5) 2 25 7.5 7.5 2.5 10 10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

SV

Valve stations Stations 2 stations Symbol 02 Note P, E port location (1) U D B Double wiring specifications U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations (2) Specified layout (up to 32 solenoids possible.)

Vacuum Pad

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Vacuum Pad

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Vacuum Pad

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Vacuum Pad

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

tubing size (mm) 1/8" x 0.086" No. 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No. 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7* 7* 7* 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 1/8" 1/4" x 5/32" 1/8" 1/4" 6 x 4 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 3/8" x 1/4" 1/8" 1/4" 1/2" x 3/8" 3/8" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

High Purity Fluoropolymer

Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2

Rotary Actuator

Obtain the actual moment of inertia ). ) = )1 + )2 m1, m2: Mass of load 1 and 2 r1, r2: Radius of load 1 and 2 L: Distance from the shaft to the center of gravity of load 2 Calculation Example m1 = 2.5 kg, m2 = 0.5 kg, r1 = 0.1 m, r2 = 0.02 m, L = 0.08 m 0.12 )1 = 2.5 x = 1.25 x 10-2 kgm2 2 0.022 )2 = 0.5 x + 0.5 x 0.082 = 0.33 x 10-2 kgm2 2 ) = (1.25 + 0.33) x 10-2 = 1.58 x 10-2 kgm2 Front