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3 M/6 M/12 Mbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 125 k/250 k/ 500 kbps Communication speed 4-branch input Specified file Note 2) EDS file GSD file 64/64 Possible to change depending on the switch setting 96/96 (3 stations, remote device station) Possible to change depending on the switch setting Occupied area (Number of inputs/outputs) 4-branch output Terminal resistor Not applicable Applicable

Electrical entry/Lead wire length Nominal size (Torque) 1 3 7 20 MSUA 1 MSUA 3 MSUA 7 MSUA20 Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire Nil L C CL CN Rotating angle Symbol Applicable Rotating angle Single vane 90 180 90 180 Available only with R73, R80 and T79 type connectors.

O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.06 in3 (1.07 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Installation Internal volume Mass 0.99 lbs (0.45 kg) 3) 1.61 lbs (0.73 kg) 3) 0.88 lbs (0.4 kg) 3) 0.8 lbs (0.36 kg) 3) 1/4 turn round knob with open/close indication

Mount the switch in a location where there is no vibration greater than 98 m/s2, or no impact greater than 490 m/s2. With a switch with orifice, the adjusted flow rate value could be affected by vibration. 3. Do not use in an area where surges are generated.

(2-color) Relay, PLC 2-wire Water resistant (2-color) 5 V, 12 V IC 3-wire (NPN) Terminal conduit 12 V 2-wire Lead wire length symbols: 0.5 m Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order.

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

Note 3) Combinations of H and M, R and S, S and T, A and H, L and M are not available.

24 V 2-wire Grommet Water resistant (2-color indication) 12 V H7BA G5BA 5 V, 12 V With diagnostic output (2-color indication) G59F H7NF IC circuit 4-wire (NPN) Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-21-37 for details.

[Exhaust center] B 4-position dual 3-port (N.O. + N.O.) [Pressure center] C 4-position dual 3-port (N.C. + N.O.) M M-type plug connector, with lead wire (With light/surge voltage suppressor) Note) For symbol, refer to page 741.

weight: m (kg) 63 50 50 40 30 50 40 30 CL1 40 20 20 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 CNA 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNS Maximum speed: V (mm/s) Maximum speed: V (mm/s) CLS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

connector, D code-RJ45, Plug, Straight 10 m (10)Connector extension cable PCA-1557769 M12 (4 pin), Straight 3 m, SPEEDCON compatible PCA-1557772 M8 (3 pin), Straight 3 m -72No.EX-OMQ0016 Revision history Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved No.EX-OMQ0016

ZQ-OM01301-A 1.How to Order Vacuum Ejector System (without energy saving function) Model of a single unit ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4)(5) (6) (7) (8)(9)(10)(11)(12) (7) Vacuum pressure switch unit specifications NilNote 3) With unit selection function (1) Nozzle nominal size M Fixed SI unit (kPa) 05 0.5 P Note 3) With unit selection function 07 0.7 (Initial value psi) 10

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

Use standard power supply cables for 3 m and 10 m lengths. Cleaning arm : Removable.

MRQ 1 3 7 20 MSUA1 MSUA3 MSUA7 MSUA20 Electrical entry/Lead wire length DNil L C CL CN Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire 20Rotating angle Symbol Applicable Rotating angle Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos.