ARJ310

1 !5 q u o Material Note Parts list !

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

S 1 pc. 3 3 pcs. n n pcs.

Vacuum Saving Valve

generator used. 1 40 30 From the flow-rate characteristics of the vacuum generator (Chart 1), calculate the suction flow (Q1) of the vacuum generator from the required vacuum pressure. 20 10 e 00 10 20 30 40 50 60 70 80 90 100 110 Vacuum pressure 50 kPa (qwe) = Suction flow (Q1) 31 l/min (ANR).

Regulator for 2 MPa Series ARX20

1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2 2.1 2.2 Set point Set point Set point Set point 0 0.9 0 1 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2 2.1 2.2 Inlet pressure (MPa) Inlet pressure (MPa) 14-4-63 Series ARX20 Construction u JIS Symbol e r w t y q SUP OUT Component Parts Replacement Parts No. q w No.

FHG

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

Miniature Regulator Series ARJ310

1 !5 q u o Material Note Parts list !

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

MGJ

Table q Standard Strokes Table w Intermediate Stroke (by the 1 mm stroke) Bore size (mm) Applicable stroke (mm) 1 to 15 (Spacer type) 1 to 20 (Spacer type) Bore size (mm) Standard stroke (mm) 5, 10, 15 5, 10, 15, 20 6 10 6 10 Model no.: MGJ6-9 Installing a 1 mm width spacer for MGJ6-10 External size: same as MGJ6-10 Example The minimum auto switch mounting stroke with 2 auto switches is 4

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1

How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications Nil None 10 For positive pressure Q CE-compliant 11 For vacuum and residual pressure ฀The PS1200 series is CE- 12 For vacuum compliant (with Q) only. Piping specification

RoHS How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Nil Q None CE-compliant Output specifications 10 11 12 For positive pressure For vacuum and residual pressure For vacuum The PS1200 series is CEcompliant (with Q) only.

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Air-hydro Unit

CCT40 M32 x 2 50 Lube-plug Rc 1/4 Air port size Rc 1/4 Oil port size DL Dimension (Effective oil level stroke) (mm) -X Effective oil level stroke (mm) 50 100 150 200 300 Technical Data L 213.5 263.5 313.5 363.5 463.5 1171 Valve Unit CCVS/CCVL Series How to Order CCV S 1 1 1 U1 Valve unit size CE-compliant S L Small flow Large flow Nil Q CE-compliant (Refer to Table 1.)

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

PSxx-OMP0001E

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

Electro-Pneumatic Proportional Valve Series VEF/VEP

Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8

AMR3000 to 6000

Body size 3 4 5 6 1 8 3 Pressure gauge ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

Coolant Valve Series SGC Made to Order Made to order specifications (For details, refer to page 389) How to Order External pilot solenoid 2 2 Y 1 A 1 T Z 10 A 05 SGC Air operated 2 2 1 A A 05 10 SGCA q w e r t y u i o !0 !1 !2 !3 !4 !