bar)]bCvC [dm3/(s?bar)]bCvSQ20003 positionClosed centerRubber sealSQ23411.90.170.461.80.290.4544 or less34 or less175, .38580 lb, SeriesType of actuationSealModelFlow characteristics (1)Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?bar)]bCvC [dm3/(s?

Mechanically Jointed Rodless Cylinder/Basic Type

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) For instructions on how to replace replacement parts/seals, refer to the operation manual. 105 Mechanically Jointed Rodless Cylinder/Basic Type Series MY3A 20, 32, 50 Replacement Procedure is P.312 Construction !4 !5 !6 !0 @2 o The numbers are the same as the "Construction" of the MY3 series catalog (CAT.ES20-165).

bar)]bCvC [dm3/(s?bar)]bCvSQ20002 positionSingleRubber sealSQ21312.30.170.513.10.180.7131 or less24 or less140, .35077 lb, SeriesType of actuationSealModelFlow characteristic (1)Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?bar)]bCvC [dm3/(s?

Compact Cylinder with Air Cushion Series RQ

H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end

bar)]bCvC [dm3/(s?bar)]bCvSQ20002 positionDoubleRubber sealSQ2241D2.30.170.513.10.180.7126 or less20 or less155, .00000 lb, SeriesType of actuationSealModelFlow characteristics (1)Response time (ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?bar)]bCvC [dm3/(s?

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

10-cy3r-e

Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

Fieldbus system Ethernet POWERLINK compatible SI unit

P tight screw (4 x 14) , 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tight screw (4 x 14) , 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5) , 2 pcs.

A-HEC-OM-J004

Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z 7.4 Communication 7-18 A_HEC-OM-J004-4 Chapter 7 Appendix 7.5 Performance Chart The values shown on the performance chart are representative and not guaranteed.

K35-OMX0029

Pipe Cover tube 13 1-2 Piping Mount applicable fittings and silencers to the correct port(s) of the air servo cylinder as specified below. P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

MHT2

D 32 MHT2 A73 S Number of auto switches The toggle mechanism holds work even when pressure drops. Toggle style air gripper Applicable auto switch 2 1 n Number of fingers S n Without auto switch (built-in magnet) 2 2 fingers See Table below for the details of auto switch specifications.

Pressure switch for energy-saving control ejector with N.O. type valve

System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse

Digital pressure switch for energy-saving control ejector

P Peak value display Displays the maximum vacuum pressure reached up to that moment. Pilot valve for air supply The solenoid valve which turns on and off the ejector. (This pressure switch outputs signal to the supply pilot valve) PNP (open collector) (output) The switch that uses the PNP transistor for output.

Air preparation filter

(Refer to Dimension diagram on P.19.) The piping of this product should be horizontal (drain exhaust should vertically face downwards.) If it is mounted inclined, laterally or upward/downward, the separated drainage will be splashed over the outlet. It may cause the operation failure of the auto drain.

IR10-OM00007

SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

PSxx-OMT0001CN

-14No.PS-OMT0001CN-E 2 (ISA3) ISA3-F ISA3-G ISA3-H (5 m ) 0.010.03 mm 0.020.15 mm 0.050.30 mm () 1 060 2 10300 2 30500 2 () 1 1 100200 kPa OUT1 OUT2 5 () 3 -20220 kPa 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 0200 kPa -20220 kPa / 1 kPa OUT2 6 0.5F.S. 1 digit (25 ) 2F.S. 0 7 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p

VFR5000-OMN0001

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

VMx-OMP0001

C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2