Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole) I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24

PFA/PFW

/2 3/4 Specifications Model Measured fluids Detection type PFW720-m-m PFW704-m-m PFW740-m-m Water Karman vortex type 0.5 to 4l/min (0.02 to 0.14SCFM) [setting is 0.6 to 4l/min (0.02 to 0.14SCFM)] Flow rate measurement 5 to 40l/min (0.18 to 1.41SCFM) 2 to 16l/min (0.07 to 0.56SCFM) and setting range Minimum setting unit 0.1l/min (0.004SCFM) l/min, gal (US) /min l, gal (US) 0 to 1MPa (0 to

76

Power cable holder (Electric wire diameter 0.71 (18) to 0.91 (23)) Drain tube for drain pan of condensed water Ventilation air inlet (with dustproof filter) Signal cable outlet (Electric wire diameter 0.67 (17) or less) Grommet with membrane Top view D E Air inlet Air outlet L K M 0.79 (20) 4 x 0.79 (20) 36.8 (935) Dimensions in (mm) Model Port size A B C D E F G H K L M P IDF125FS JIS ange

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Uniaxial Electric Actuator Series LJ1

Horizontal Load point distance mm Load point distance mm LJ1H20 LJ1S20 W 50 10 50 10 Horizontal load 100% Horizontal load 50% 5000 10 20 5000 10 20 Amount of deflection m Amount of deflection m 500 1000 2000 500 1000 2000 Lateral load 100% Lateral load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 Load point distance 5 5 Lateral load 100% Lateral load 50%

Clean Air Module

ISO compressed air quality class The class regarding the cleanliness of compressed air (solid particles, moisture and oil) stipulated by ISO 8573-1:1991 (JIS B8392-1:2000) Maximum oil concentration (mg/m3) Minimum pressure dew point (C) Maximum particle size (m) Quality class 1 2 3 4 5 6 0.01 0.1 1.0 5 25 70 40 20 3 7 10 0.1 1 5 15 40 Notation system Example) Solid particle size: 0.1 m

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo Chiller, HRS090 AND LARGER CAPACITIES, O88, 250.00000 lb

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

125

and M plug connectors. * Refer to page 1738 for the connector assembly with a dustproof cover for L and M plug connectors.

3 Port Solenoid Valve

s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Series TPH Clean Tubing Polyolefin Tubing

Clean Tubing Polyolefin Tubing Series TPH RoHS How to Order TPH0604 B 20 Tubing model Color Length per roll Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20 m roll 100 m reel 20 m roll 100 m reel Burst Pressure Characteristics Curve and Operating Pressure Model TPH0425 4 2.5 TPH0604 6 4 TPH0806 8 6 TPH1075 10 7.5 TPH1209 12 9 Model O.D. (mm) I.D.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

, , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

-fl Seies

, , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"

VQ7-6/7-8

(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action