Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1, Output Specification: OUT1: NPN; OUT2: Analog 4 to 20mA, Temperature Sensor: Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Furthermore, if the cable length exceeds 5 m, then the speed and work load may decrease by up to 10% for each additional 5 m. Note 2) Pushing Force accuracy is 20%. Note 3) The speed and force may change depending on the cable length, load and mounting conditions. If the cable length exceeds 5 m then the speed will decrease by up to 10% for each 5 m (at 15 m it is reduced by up to 20%).

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

TMH ASD AS Maximum return speed (mm/s) 100 200 300 Speed Controller Cylinder Solenoid valve Tubing Silencer AS-FE 6 ASD230FG CJ2 SYJ500 TU0604 1 m AN11001 KE 10 16 Cylinder size AS-FG AS-FG 20 ASD330FG CM2 SYJ700 TU0604 1 m AN11001 Cylinder size 25 AS-FP 32 Values at 0.5 MPa and 20C.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 151) Item 14 * For altitude of 1000 m or higher. Note 10) The anchor bolt xing brackets (including 4 M10 bolts) are used for xing to wooden skids when packaging the thermo-chiller. No anchor bolt is included. 138 A

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

High Power Cylinder Series RHC

95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 80 391 13 47 3/4

20

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

PSE57  Series Pressure Sensor for General Fluids

Temperature characteristics (25C reference) 2%F.S. (0 to 50C) 3%F.S. (10 to 60C) 3% F.S. (0 to 50C) 4% F.S. (10 to 60C) 5% F.S. (10 to 60C) Accuracy Enclosure IP65 Withstand voltage 500 VAC for 1 minute between terminals and housing Insulation resistance 100 M or more (500 VDC measured via megohmmeter) between terminals and housing Operating temperature range Operating: 10 to 60C, Stored:

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: M (Applicable to Deionized Water Piping)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: M (Applicable to Deionized Water Piping)

Cooling Capacity: 090 (9.5 kW Air/ 11.0kW Water), Cooling Method: W (Water-cooled Refrigeration), Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: M (Applicable to DI Water Piping)

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]