Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 3 5 OUT 16 6 8 10 11 MXJ4 2 4.5 3 4 5 13 6 IN 8 9 6 8 11 28 14 OUT 17 20 MXJ6 3 6 4 6 8 21 11 IN 13 15 10 15 20 50 25 30 OUT 35 MXJ8 4 8 8 11 15 38 19 23 IN 26 Note) Theoretical output (N) = Pressure

How to Order [Option] Q R06 L PS 00 10 Option (CE-compliant ) Output specifications Nil None 10 For positive pressure Q CE-compliant 11 For vacuum and residual pressure ฀The PS1200 series is CE- 12 For vacuum compliant (with Q) only. Piping specification

Pressure setting trimmer Left end adjustment limit Right end adjustment limit Dimensions Dimensions A 16 16 13 16 30 3000 Applicable One-touch fittings 25.5 KQ2H/L/T/S/Y06-M5 KQ2H/L07-M5 Other Series KQ2/KS Series KJ AIRCHECKER + PS1000-R06L 13 MADE IN JAPAN G Pressure setting trimmer LED indicator 10 A 30 Revision history Addition of PS1200 (For vacuum) QS Edition B 6 reducer 1/4" reducer

PVQ10

Compact Proportional Solenoid Valve Series PVQ10 How to Order 13 03 M5 5 PVQ L A Base mounted Body / Seal material Valve type / /! & ! 13 A Voltage 5 6 $* ( Port size '$ ( 0 3 % 2 0 0-4 3 2 0 3 ') 5 ')1 $ " Electrical entry Nil 1 0 L /0-4 M5 % 2 0-4 5 + 0 M Orifice size 67 5 0 /!

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Unrestricted 360 piping tube mounting on the IN side Metric size Easily replaced filter element Easy installation and removal with One-touch fittings 3 16 1 4 1 4 3 8 1 2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13

ZH

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 2 1.6 20 3 25 3 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 3 4.5 35 4 50 4 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2

Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series

Symbol 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40 B5 M5 x 0.8 40 50 50 Material NBR N Pad type Silicone rubber S Ball joint type F Urethane rubber U FKM F Conductive NBR GN Conductive silicone rubber GS Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, Vertical Vacuum Inlet, w/buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 13 lb

)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 6.06271 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 5.51155 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Please contact us for the latest version.sales@ocaire.com, 25MM MXS CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, I5, 25MM MXS CLEAN ROOM, 6.3934 lb, ModelABEAuto switch operation range StrokeStroke 10203040507510012515010203040507510012515013-MXS252337.527.517.517.520.536.552.585.5100.535.5(33)25.5(23)15.5(13)15.5(13)18.5(16)34.5(32)50.5(48)83.5(81)98.5(96)8

Vacuum Regulator

Applicable model Indicated pressure range Unit display Scale range 100 to 0 kPa kPa 270 180 10 width across flats Pressure Gauge GZ33 Assembly P601010-12 GZ33-K-01 q w e Included Parts No. 1 2 3 30 Description Pressure gauge Gauge nut O-ring R 1/8 3 breathing port 9 1 to 3 are assembled before shipment. (17) 13 GZ43-K-01 Pressure Gauge GZ43 Assembly P601020-12 l12 q w e Included Parts No.

KB

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

High Vacuum Slit Valve

Troubleshooting 12 AttachmentProcedure for Maintenance 13 to 15 1 - SLIT VALVE Safety Instructions C These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Check Valve Series AK

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.