Digital Flow Switch (Remote type sensor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -23No.PF-OMJ0016-J Pressure loss (at 350 [kPa]) -24No.PF-OMJ0016-J Dimensions

Solid State Auto Switch

mA Internal voltage drop 0.8 V or less at load current of 10 mA (2 V or less at load current of 40 mA) 4 V or less Current leakage 100 A or less at 24 VDC 0.8 mA or less Operating time 1 ms or less Indication light Operating position: The Red LED turns ON Optimum operating position: The Green LED turns ON Electrical entry Grommet Lead wire Vinyl sheath cable 2.6, 0.15 mm2, 2-wire (D-M9BW

LMU100/200 Series Mist Spray Unit

3 LMD1-4 LMD1-5 LMD1-6 n 3 6 9 12 15 18 L1 4 x 5.5 3 x Rc1/8 n = Rc 1/8 LMD2 n: Stations L1 25.5 44.5 63.5 82.5 101.5 120.5 L 38 57 76 95 114 133 Model LMD2-1 LMD2-2 LMD2-3 LMD2-4 LMD2-5 LMD2-6 n 2 4 6 8 10 12 2 x 6.5 n x Rc1/8 2 x 6.5 2 x Rc1/8 L1 1067

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

EX500-DX_e

Description Input unit specifications 1 Power supply (24 VDC) 3 1 2 2 Mounting and Installation (Input) 2 EX500-DX A Models EX500-DX B The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

color indicator) 2-wire 12 V 24 V Grommet Yes Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 2-wire 12 V 3-wire (NPN equivalent) Reed auto switch 5 V Z76 IC circuit Yes Grommet 100 V Z73 IC circuit Relay, PLC 24 V 12 V 2-wire Z80 100 V or less Lead wire length symbols: 0.5 m Nil (Example) Y7BW 3 m L (Example) Y7BWL 5 m Z (Example) Y7BWZ Solid state auto switches marked with

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V 24 V 2-wire Grommet Water resistant (2-color indicator) 12 V F7BA F7BAV With diagnostic output (2-color indicator) IC circuit F79F 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) IC circuit A76H 5 V A72H A73H A80H A72 A73 A80 A73C A80C Grommet 200 V 100 V 12 V Relay

IDX-OM-W034

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

Multistage Ejector Series ZL

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Stainless Steel 316

Note 2) Figures shown when using FEP tubing 2 Applicable tubing: Metric size/Connection thread: M, R Series KQG Stainless Steel 316 One-touch Fittings Dimensions Union Elbow: KQGL 2 x Applicable tubing Effective area Note 2) (mm2) N M Q2 Q1 A L Note 1) Applicable tubing O.D.

PSE57  Series Pressure Sensor for General Fluids

Pressure Sensor for General Fluids RoHS PSE57 Series How to Order PSE57 0 01 Sensor range Option (Lead wire) 0 Positive pressure [0 to 1 MPa] 3 Compound pressure [100 to 100 kPa] 4 Positive pressure [0 to 500 kPa] 5 Positive pressure [0 to 2 MPa] 6 Positive pressure [0 to 5 MPa] 7 Positive pressure [0 to 10 MPa] Nil Lead wire and M12 connector (3 m), Straight L Lead wire and M12 connector

S Couplers

(See Fig. 2.)

Stainless Steel One-touch Fittings Series KG

KGT10-04 36 37 66 31 41 22 1 4 3 8 KGT12-02 KGT12-03 31 33 35.5 37 17 12 22 57.2 45.2 20.9 28.5 17 1 2 KGT12-04 37 39.5 22 68 3 8 KGT16-03 26.5 38 20.9 34 25 71 (71) 100 (100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R(PT) thread installation.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VXD

B Grommet 100 VAC With surge voltage suppressor 12 One-touch fitting C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C.

Compact Guide Cylinder End Lock Type SeriesMGP

40, 50, 63 P P P P P P P P P P P P MGPL Ball bushing Front lock Locking type Series MGP How to Order MGP M H Z73 N 100 32 Compact guide cylinder Number of auto switches Nil S 2 pcs. 1 pc.

Air Cylinder: Standard Type Double Acting, Single Rod Series NCG/CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

2-wire Diagnostic indication (2-color indication) Grommet B59W G59 G5P K59 G59W G5PW K59W G5BA G59F M9N M9P M9B M9NW M9PW M9BW M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 12 V Grommet 24 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Water resistant (2-color indication) Diagnostic output (2-color indication

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

B64 C73C C80C B59W 100 V Reed switch Grommet 100 V or less IC circuit 100 V, 200 V 12 V Relay, PLC 200 V or less 2-wire 24 V Connector 24 V or less Grommet Diagnostic indication (2-color indication) Solid state switches marked with are produced upon receipt of order.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L1 L2 L3 L4 M d Effective orifice (mm 2) Weight (g) A O.D.