IDX-OM-U021

0 1 1 0 2 3 3 2 4 5 5 4 6 7 7 6 3 2 5 4 7 6 0 1 2 3 4 5 OFF OFF5.2 3 3 IDF100150F 3-6 3 3 IDX-DM-U021 3 3-7 2A 80VA 100W DC5V,2mA IDF100150F 3-7 3 4 IDX-OM-U021 4 4 4-1 5 310 4-2 4-2-1 () 300 300 4-2-2 IDF100150F 4-1 4 1 IDX-OM-U021 4 501015 ( ) ,0 IDF100150F 4-2 4 2 IDX-OM-U021 4 OFF 5 4 (4 ) () O O O O 3mm ) 4 5Nm IDF-S1758 1 IDF100150F 4-2 4 3 IDX-OM-U021 4 4-2

IDX-OM-Z004

IDF100150F-W 2.3 2 9 IDX-OM-Z004 2 2.4 ()2 4 4.2 IDF100150F-W 2.4 2 10 IDX-OM-Z004 3 / 3 3.1 INOUT R INOUT 3.2 ONON IN OUT 5 IDF100150F-W 3.1 3 1 IDX-OM-Z004 3 ONOFF 0.05MPa 3.3 OFF OFF 3.4 3 3 5 3.5 OFF IDF100150F-W 3.3 3 2 IDX-OM-Z004 3 3.6 0 1 0 1 0 1 2 3 2 3 4 5 4 5 6 7 6 7 2 3 4 5 6 7 0 1 3 4 5 OFF OFF5.2 3 3 IDF100150F-W 3.6 3 3 IDX-OM-Z004 3 3.7 2A 80VA

EX510-GDN1.eng

Make sure to set the station number in the range of 0 to 63. HW/SW mode setting (switch No.10) The setting is as follows.

EX600-SPRA_eng

(default setting) Number of occupied valve 8 outputs Number of occupied valve 16 outputs Number of occupied valve 24 outputs Number of occupied valve 32 outputs Configuration X10 2 0 9 0 0 Mark C on the unit Mark B at cable end Mark A at cable end : : Address (1) Setting of the terminal resistor X1 Content 3 4 1 2 5 0 9 1 0 8 7 : : Content 9 6 5 x10 x1 0 5 4 1 2 3 0 (default setting) Node

AP10PA

No gauge port Ports No code No code M V X No pressure gauge (Connections: 1/4 inch face seal male) Code Ports 2 ports 3 ports 4 ports 0 2PW 3PW 4PW V3 L 1 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig Porting Configuration

8

9 2-wire type pressure switch 16-13-5 16-13-2 10 Glossary of Terms A Absolute pressure The pressure based on the absolute vacuum condition (0 standard).

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Open type, Dripproof/Rainproof, Splashproof /Low jetproof type 1 0 NBR FPM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Metal material for wetted parts Enclosure 0 Open type 1 0 Brass, Phosphor bronze Dripproof/Rainproof type (Equivalent to IP42) 1 Stainless steel

ZSE2/ISE2

to 101 kPa 0 to 100 kPa 0 to 1 MPa Air/Non-corrosive, non-flammable gas 1.5 MPa 500 kPa Fluid Power supply voltage Current consumption Response time Repeatability Enclosure 12 to 24 VDC 10%, Ripple (P-P) 10% or less 17 mA or less at 24 VDC 5 ms or less 1% F.S. or less IP40 Operating: 0 to 60C, Stored: 10 to 60C (With no condensation, nor freezing) Operating/Stored: 35 to 85%RH (With no condensation

ZSE3/ISE3

Display the error code on LCD. 3 1/2 digits (5 mm-size numerals) Overcurrent, Overpressure, Data error Pressure during 0 clear 0 to 60C (No dewing) 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Between external terminals and housing 1000 VAC, 50/60 Hz for 1 min.

High Purity Fluoropolymer Needle Valve Series LVN 1

2 4 6 8 10 0 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

0 !1 !2 Material Polyethylene Part no. ZM-FCB-0 ZM0-0 ZM-SF ZM-SA VJ114ZM-PV-0 Filter cover assembly Diffuser assembly Suction filter Silencer assembly Pilot valve Poppet valve assembly ZSE1-00ZSM1-015 ZSM1-021 !3 Vacuum pressure switch NBR ZM-CV !

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

SMC Pneumatic Clean Series

1 2 3 4 5 6 7 8 9 10 0 Valve operating cycle x 104 10 Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 8 Line B 6 Line C 4 2 0 0 1 2 3 4 5 6 7 8 9 10 Valve operating cycle x 104 Example of air line equipment Example of oil-free air equipment Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0

60

Handle: Flame resistant PBT (Equivalent to UL-94,V-0) Handle: Flame resistant PBT (Equivalent to UL-94,V-0) Material: Resin (Handle, bonnet) Material: Resin (Handle, bonnet) Bonnet: Flame resistant PBT (Equivalent to UL-94,V-0) Bonnet: Flame resistant PBT (Equivalent to UL-94,V-0) 76 g 76 g Body: Aluminum Body: Aluminum VHS20 (Aluminum body is standard): 190 g VHS20 (Aluminum body is standard

RZQ

0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !1 CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G @2 !5 !7 !6 !4 @3 t !

Table of Contents

0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Guide Table Series MGF ø40, ø63, ø100 1

Bore size (mm) A B MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 63 100 4 0 14.5 0 CX 19.5 0 Dimensions above denote the standard strokes. Adjustment on A dimension is required for intermediate strokes.

10-cy3r-e

. @4, @6, @7, @8 @4 @5 @6 @7 @8 @9 #0 Cylinder tube gasket NBR Set of left nos. @4, @6, @7, @8, @9, #0 Wear ring A 6, 10: Not available Special resin CY3R10-PS 10 CY3R10-PS Wear ring B Special resin CY3R15-PS 15 20 25 32 40 50 63 CY3R15-PS CY3R20-PS CY3R25-PS CY3R32-PS CY3R40-PS CY3R50-PS CY3R63-PS Wear ring C Special resin CY3R20-PS CY3R25-PS Piston seal NBR Set of left nos. @4, @5, @6,