2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 6-16-

Auto Switch Guide

CLS CLQ Auto Switch Internal Circuit D-H7A1 MLGP Weight RLQ (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model MLU Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 ML1C 81 92 92 5 DDC () Blue Dimensions -X D-H7A2 20DC (+) Brown Data OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most

ZMA

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series. Mounting Warning 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1,000 m/s2) when handling.

Plug-in Unit

A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL. B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd. Oki Electric Cable Co., Ltd. SOL. A SOL.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1) 11 (Pitch) P=10.5 4.5 12.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 M3 x 0.5 (A port) 13.5 A A 13 10 (Pitch) P=10.5 11.5 M3 x 0.5 (A port) L plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer

CLK1

33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.

VZS

(Put packing B w on the surface contacting to the end plate.) 4 stations (12 stations) 5 stations (13 stations) 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !0 as shown in the right figure.

Clamp Cylinder with Lock Series CLK1

33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting (mm) 1in = 25.4mm Minimum strokes are as follows based on the space required for mounting auto switches.

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

Auto Switch Guide

Auto Switch Internal Circuit D-H7A1 Weight (g) DC (+) Brown D-H7A1 D-H7A2 D-H7B Auto switch model Main circuit of switch Main circuit of switch Main circuit of switch 11 13 13 0.5 OUT Black Lead wire length (m) 50 57 57 3 81 92 92 5 DC () Blue Dimensions D-H7A2 DC (+) Brown OUT Black DC () Blue Indicator light D-H7B 3.5 mounting hole OUT (+) Brown Most sensitive position OUT () Blue 8-30-

EXxx-OMW0014CN

EX245-DX1 . 13-7 EX245-DX1 No. / SI US1 1 / US1 / / / 2 LED 1 24V3 0V 13.3. EX245-DY1 . 13-8 EX245-DY1 No. SI US2 1 US2 / 2 LED 2/4 3 0V 83 No.EX-OMW0014CN-A 13.4. EX245-LA1/LB1 . 13-9 EX245-LA1/LB1 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4