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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Hydraulic Filters

215 215 265 265 265 325 325 130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

AW

Symbol Body size Description 10 20 30 40 60 Without backflow function With backflow function Nil K Note 1) With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N Note 2) F Note 3) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Mounting Without mounting option With bracket With set nut (for panel fitting) a Nil B Note 5) H + Without auto drain Float type auto drain

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

MM 28 28 H 5 5 GB 5 5 GA 8 8 F 4 5 D 15 15 A 10 16 Bore size With air cushion With air cushion type is not available for 21-/22-CJ2.

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

Microspeed Cylinder

When a load, such as a relay or solenoid valve, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

mlu

MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Fieldbus system EtherNet/IP TM compatible SI unit

Proper use of the seal cap enables the enclosure to achieve IP67 specification. -32No.EX-OMN0032-D Specification Specifications Model EX600-ED2EX600-ED3specifications Power connector M12 (5 pin) Plug 7/8 inch (5 pin) Plug Power Power supply (Control and input) 24 VDC 10% Class2, 2 A 24 VDC 10%, 8 A Power supply (Output) 24 VDC +10/-5% Class2, 2 A 24 VDC +10/-5%, 8 A Enclosure IP67 (With manifold

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

AZ1000

600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101 5.22 (132.6) 0 1 2 3 4 5 6 7 8 9 10 Flow rate

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

mb1

MM 2-RcP G G MM D D e e Effective thread Effective thread 13 13 9 A K f N N f h + Stroke K A l + Stroke 9 l ZZ + 2 strokes S + Stroke h Without Air Cushion Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84

70astamb1

across flats MB J K MM N P V W S ZZ S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 4 4 5 5 5 5 M6 x 1 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type 20 (5 Port/Body ported) SS5YJ520P 05 A, B port Applicable blanking plate assembly SYJ5000-21-3A A A B A P, R port thread type P port 1/8 B Number of stations A B B 03 3 stations Nil 00F 00N 00T Rc G NPT NPTF : : Applicable connector assembly Refer to page 35. 12 12 stations R port 1/8 Type 41P (5 Port/Base mounted) How to Order SS5YJ541P 05 M5 A A B A, B port M5 x 0.8 A P, R port thread

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Table of Contents

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.