Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

DOC1001947

M5, 10-32UNF 9 23/64 It may cause damage to the product body or the fitting. R1/8, NPT1/8, G1/8 13 1/2 R1/4, NPT1/4, G1/4 17 11/16 When there is any possibility of having oscillation or rotation of the body A, have the tubing secured when using the product.

FGX-OM-R008

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

VEX-OMV0001

2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,NPT 23

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

. *2: The D-P3DWA is mountable on bore size 25 to 100. *3:1 m type lead wire is only applicable to the D-A93. *: Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ *:Solid state auto switches marked with are produced upon receipt of order.

Rotary Table Series MSQ

MSQB1A(Size:1) Rotary Table Rotary Table Series MSQ Size:1, 2, 3, 7 Compact and light weight design Compact and light weight design Coming out in September, 2001 A Size Weight(g) Model 70 105 150 250 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A B mm Size Model A B C D 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A 50.5 56 60 73.5 28 30 34.5 41 25 28 30.5 34.5 16 18 20.5 23 C D Scale :100% (MSQB1A) Flexible

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

IZx-OMV0005

The procedure for mounting the cartridge assembly is the reverse of removal. 23 Doc. no.IZ-OMV0005 4-4. Alarm function If abnormal functioning occurs during operation, the user is alerted by the external output signal or LED operation.

Air Catch Sensor

No.PS-OMF0007-E PRODUCT NAME Air Catch Sensor MODEL / Series / Product Number ISA2 Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 13 Definition and terminology 14 Mounting and Installation 15 Wiring 17 Setting 18 Designing data 20 Troubleshooting 23 Specification 26 Specifications 26 Dimensions 27 -1No.PS-OMF0007-E Safety Instructions

Air Cylinder Series CJ1

D-X Individual -X Bore size (mm) Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Stroke Technical data 4 19

Safety Instructions

(mm) Metric size M TD0604 6 4 TD0806 8 6 Translucent (material color) Air, Water, Inert gas TD1075 10 7.5 TD1209 12 9 4 2.5 H 10 m 20 m Roll KK Color Fluid Note 1) D Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment:

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment:

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment:

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment:

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Blue] Blue, Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment: Standard, Coil

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Blue] Blue, Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment: Standard, Coil

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Blue] Blue, Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment: Standard, Coil

Type: Straight, Material: [Nylon] Special Nylon Resin, Cutting Service: Not Available, Color: [Green] Green, Outer Diameter Class: ~6, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 6, Inner Diameter Class: ~4, Inner Diameter d(Ø): 4, Material: Urethane: -, Material: Nylon: [Nylon 12] Nylon 12, Material: Fluororesin: -, Minimum Bending Radius(mm): 23, Operating Environment: Standard,