Regulator

Product (15) Plug assembly -24- 11. Disassembly Drawing 11-1. AR20-D/ AR30-D/ AR40-D/ AR50-D/ AR60-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Washer (only for 50 and 60 sizes) Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap OUT Body I N -25- 11-2.

ELECTRO-PNEUMATIC POSITIONER

) 27-28 11-3 External feet back lever (Type IP8000) 28 11-4 Resin Cable cramp unit ( Type non-explosion protection) 28 11-4 Scale plate unit 29 13.How to order 30 14.Attached Drawing 31-37 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Fieldbus system PROFINET compatible SI Unit

The following figure Fig. 3-11 shows examples on the use of two different cable types.

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

PEEK

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 LVM10R4 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 LVM10R6 N.O. N.C. 3 2 1 25.5 (16) N.O.

3

U PF3W 5 1 Remote sensor unit PF3W 7 11 25 A M Integrated display U Made to Order Type Seal material EPDM X109 5 7 Remote sensor unit Integrated display (Refer to page 17.) Bracket (Option) Nil None Bracket Rated flow range (Flow range) Symbol Rated flow range 11 21 10 to 100 L/min 30 to 250 L/min Note) With bracket is R not available for 250 L/min type.

VDW

M5 10 42.5 4 11 15.5 30 15 22 20 8 13.5 M3 M5, 1/8 11 5 15 17 36.5 11 Series VDW Glossary of Terms Pressure Terminology Others 1.

IDX-OM-W010

Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13

30

A 11 Series KQB2 Applicable Tube: Inch Size, Connection Thread: UNF, NPT Dimensions Bulkhead Union: KQB2E Mounting plate thickness 7 mm or smaller Applicable tube O.D.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 11 11 Vacuum suction port M5 x 0.8 N x M5 x 0.8 thread depth 6 Note 1) Note 2) Extension end adjuster 36.5 (Extension end adjuster) 5.5 11 5H9 ( ) depth 5 +0.030 0 Retraction end adjuster 6 12.5 (Extension end adjuster) 24.5 28 58 1 24 3.5 49 29 24.5 14.5 5H9 ( ) depth 5 +0.030 0 F 6.5 4 x M5 x 0.8 thread depth 7 2 N 1 x F 14 41 3 x M6 x 1 thread

CRBB-OM00004

Adjustment method 6 3.1 Vertical auto switch unit 6 Operating Range and Hysteresis 6 Auto Switch Mounting 7 Auto Switch Adjustment 10 3.2 Angle adjustment unit 11 Rotating angle with angle adjustment unit 11 Rotating Angle Adjustment Method 11 4.

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

EXxx-OMW0014CN

(EX245-DX1EX245-DY1EX245-LA1/LB1) 1 88 EX600-ZT1 . 11-1 (EX600-ZT1) 74 No.EX-OMW0014CN-A 11.2. Y Y (EX245-DX1EX245-DY1) Y 2 2M12M12 2M8M12 PCA-1557785 Y (2M12M12) A code() A code() A code() . 11-2 Y (PCA-1557785) 75 No.EX-OMW0014CN-A PCA-1557798 Y (2M8M12) A code() . 11-3 Y (PCA-1557798) 76 No.EX-OMW0014CN-A 11.3.

HRX-OM-W058

Weight*11 kg 45 *1 Use the product in conditions where freezing will not occur.

HRX-OM-X027

Weight*11 kg 69 *1 Use the product in conditions where freezing will not occur.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

4/5 Port Air Operated Valve Series SYJA3000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

EX510

10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.