High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

IN20267

Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.

Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE

FOR TECHNICAL SUPPORT PLEASE CALL 1-800-762-7621 Page 6 last updated 11/03/03 10:05 AM

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Intrinsically Safe Valve

(Mounting hole) (12) 24.9 43.85 L (Lead wire length) 153.4 3 x 1/4" {1(P), 3(EB), 5(EA) port} 56.3 23 0.5 0.5 EB 3 P 1 EA 5 49.8 02 03 L-type plug connector with cover (LL) 53-SY9120-LLInsulator: Red (+) Insulator: Black () 4.1 16.7 0.3 mm2 L (Lead wire length) 148.3 02 03 Terminal type (TT) 53-SY9120-TTLead wire marking No. 1 (+), No. 2 () 14 0.75 mm2 L (Lead wire length) 165.1 Max. 10 11

Series AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

Stroke Reading Cylinder and Counter

NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 M8 x 1.25 5 13 15.0 12.5 32 . 40 M14 x 1.5 8 22 25.4 21.0 50 . 63 M18 x 1.5 11 27 31.2 26 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

Smooth Vent Valve

Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

Compact Cylinder

5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25 10.5 13.5 11 5 1.6 17 57 49 16 20 74 14.5 M10 x 1.5 96 3 17 8 56.5 6.6 M8 x 1.25 10.5 15.5 11 5 1.6 17 7 ISO Standards [ISO/21287] Compact Cylinder Series C55 Mounting Bracket Foot bracket Flange bracket Hexagon socket head cap screw (accessory) 2 x FD

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

11 Since this is a guideline including hysteresis, not meant to be guaranteed.

CJP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 A dimension B dimension C dimension W dimension 5, 10, 15, 20 (st) 30 (st) 3.5 Bore size (mm) 6 10 15 D 5, 10, 15, 20 (st) 30 (st) 7.5 10 11 5, 10, 15, 20 (st) 30 (st) 1.5 3 3.5 5 (st) 2.5 2 10, 15, 20 (st) 30 (st) 5 4 3.5 CA2 9.5 9 9.5 CS1

CUJ

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Bottom mounting Bottom mounting Application Example Assembly lines, inspection lines etc. with turning operations Front mounting Side mounting Series Variations Bearing type Bore size (mm) Standard stroke (mm) Model Slide bearing MGTM 63 80 25, 50, 75, 100, 125, 150, 175, 200 Ball bushing bearing MGTL 100 8-24-2 3 Cylinder with Turntable Series MGT 63, 80 100 How to Order MX MTS M 63 50 11

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

Fieldbus system Ethernet POWERLINK compatible SI unit

Value x 0.01 (mA or V) 0 Value (-32767.. 32767 ) Lower limit AD value of Analog Range. 10 Lower Limit Value*1 True Output will be fault value. 11 Fault Mode Analog False Output will be held last state. Set output per channel when communication error is occurred.

PFxx-OMO0004CN

) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]