ZSE F/ISE

30 20 2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 16-2-34 11 Series ZSE50F

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection S type: White color L type: Black color Applicable tubing diameter N Applicable tubing diameter E (Mounting hole) B C D E F G H Model A Applicable tubing diameter

Digital Flow Switch (Integrated display type)

B: Contents revised in several places. C: Contents revised in several places.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator light Body ported Manual override VKF Note 1) Based on JIS B 8375-1981.

VVX31/32/33

40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

T/TIA

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.

PF3W7x.eng

PF-OMW0011-B

Air cylinder

Table 10 Bore size(mm) Hexagon socket head cap screw Width across flats Tightening torque(Nm) A 32,40 MB-32-48-C1247A 4 5.1 B 50,63 MB-50-48-C1249A 5 11 Foot MB-80-48AC1251A 6 25 Other MB-80-48BC1251A 80,100 125 Foot M12X1.75X25(thin socket head) 8 30.1 Other M12X1.75X28(thin socket head) 5)When replacing mounting brackets, tie-rod nuts on the cylinder body become loosened.

Output block / Power block

M12 5-pin B-code (Reverse key), Socket No.

Safety Instructions

Do not disassemble or modify the main body. 16-11-3

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 Data 6-14-11 12 Series NCM Dimensions: Double Acting, Single Rod Double acting, single rod Rod side nose mounting: NC(D)MB B dia. pilot MM dia.

Slide Tables MX Series

Slide the table forward. 2 B Always detect ON Adjust the switch position according to loads or speed. (Unit:mm) B A 2 2.5 4 5 5.5 10 Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1 3 17 MXF Series Low Profile Slide Table Operation Guide Slide table mounting Cautions on use The table is supported by precision bearings.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

2 Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Without auto switch B 20 30 D CQ2 B 20 30 D J79W S CDQ2 With auto switch Built-in magnet Number of auto switches Mounting style 2 pcs. 1 pc. n pcs.

SI Unit for Vacuum Manifold

Wiring 11 2.1. Communication/Power connector 11 2.2. FE terminal 11 3. Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1. Input process data 22 4.2 Output process data 26 5. Example of energy saving operation of ejector 28 6. LED indication 29 7. Event 30 8. Specification 31 8.1.

SFOD-OMT0012

For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

Setting software for e-Actuator (e-Actuator setup tool)

Windows 11 (64bit) Resolution of 1366 x 768 dpi or higher recommended.