D. P. Lube (Unit) Series ALD(U)600/900

(Connection port center) (Connection port center) F (Bracket mounting dimensions) Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141 164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E C D B A Model Port size 4 3 F 345 419.2 G 32.5 0 H 95 120 J 14 14 K 57 49.6 1 1 , 87.5 125 4

HRX-OM-I051

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Process Pump

Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right Air exhaust port (AIR EXH) Switching valve Air supply port (AIR SUP) Pilot valve B Pilot valve A Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Shaft Suction port (FLUID IN) Diaphragm A Diaphragm B Drive chamber A Drive chamber B Control unit pushing pilot valve A. 3.

Modular Type Regulators Series AR

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

VKF300

n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 7 Series VKF300 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications 6 10 Bore size (mm) Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate L/min (ANR) 6 10 1.05 MPa 7 15 0.7 MPa 0.15 MPa 0.1 MPa 10C to 60C (No freezing) 30 to 400 mm/s Rubber bumper

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

XL-OMV0002

15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

ISO Standards [ISO/21287] Compact Cylinder 20,25,32,40,50,63,80,100 Series C55 How to Order B 20 10 C55 B 20 10 M9B S CD55 With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 No.VT325-OMK0002-B VT325 Series 3 Port Solenoid Valve Precautions 1 Be sure to read this before handling products. 10.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

6 8 10 Stroke Motor option Actuator cable type/length 50 50 Nil Without option Robotic cable [m] to to B With lock Nil None R8 8 1200 1200 Grease application (Seal band part) R1 1.5 RA 10 *For details, refer to the applicable stroke table below.

Thermoelectric Bath

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

PEEK

The values of Av and Cv are based on JIS B 2005:1995, C and b are based on JIB B 8390:2000.

HRX-OM-R039

8 Documents 8.5.3 OPTION-T (HRSE012/018-A-10-T) 0.3 0.25 Circulating fluid pressure [MPa] 20 0.2 Pump head [m] Outlet : 60Hz 0.15 0.1 10 Outlet : 50Hz Return port 0.05 Available area 0 0 5 10 15 20 25 30 Circulating fluid flow [L/min] Fig. 8.5-3 Pump capacity (HRSE012-A-10-T, HRSE018-A-10-T) 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) 0.3 0.25 Circulating fluid pressure [MPa] 20 0.2 Pump

Magnetically Coupled Rodless Cylinder/Linear Guide Type Series CY1H Single Axis Type:

Grease pack part no. for 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 25: GR-S-010 (10 g) Wear ring A Special resin 10: Not available CY1H10-PS 10 CY1H10-PS Wear ring B Special resin CY1H15-PS 15 20 25 CY1H15-PS CY1H20-PS CY1H25-PS Set of left nos. @9, #0, #1, #2, #3, #4 Piston seal NBR CY1H20-PS CY1H25-PS Scraper NBR O-ring

Sine Rodless Cylinder/Slider Type Series REAL

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Sine Rodless Cylinder/Direct Mount Type Series REAR

9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g).

06-real-e

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

06-rear-e

9 @0 @1 @2 @3 24 Cylinder tube gasket NBR REAR10-PS 10 REAR10-PS Wear ring A Special resin 10: not available REAR15-PS 15 REAR15-PS Wear ring B Special resin Piston seal NBR Note 1) It may be difficult to replace the cushion seal @3. Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g).