Information

Function Function Terminal name Terminal name 24 V 1 1 COM+ COM+ 24 V 0 V 2 2 COM COM 0 V Pulse signal 3 3 NP+ NP+ Pulse signal Pulse signal 4 4 NP NP Pulse signal Note 1) Note 1) Pulse signal 5 5 PP+ PP+ Pulse signal Pulse signal 6 6 PP PP Pulse signal Input 7 7 SETUP SETUP Input Input 8 8 RESET RESET Input Input 9 9 SVON SVON Input Input 10 10 CLR CLR Input 11 11 12 12 Load Load 13 Output

ZSE3/ISE3

22.6 5.75 Vacuum supply port 2-3.3 Mounting hole Vacuum pad connection port 0X: M5 x 0.8 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0 Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button Pneumatic circuit SET button UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 Vacuum pad connection port Vacuum supply

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 314 283 251 220 188 157 126 0UT 94 63 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) 236 212 189

JSY1000/3000/5000 Series (Non Plug-in)

As a guide, insert bolts in 2 locations for 2-5 stations, 3 locations for 6-10 stations, 4 locations for 11-15 stations, and 5 locations for 16-20 stations. 2. When using the manifold with DIN rail in an environment where any vibration or impact is applied to it, the DIN rail itself may be broken.

Finger Valve

JIS symbol 2 port valve 3 port valve 10 4. Construction (2) VHK2A(R) VHK3A(R) (9) (4) (1) (5) (3) (11) (10) (7) (8) (6) No.

EX600-SDNA_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status

MXF

8 4 IN 38 27 23 19 11 15 8 MTS 79 68 57 34 45 23 OUT 113 12 6 60 51 43 26 34 17 IN 85 OUT 201 141 121 101 80 60 40 16 8 151 IN 106 91 76 60 45 30 Made to Order Specifications (For details, refer to pages 1955 to 2021.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71 47 236 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Symbol Specifications -X7 -X9 -X11 -X33 -

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

DIQ-69200-OM002

Lock keys (refer to P9) Minimum pressure (F_1) adjusting range Maximum pressure (F_2) adjusting range 120% 100% 100% 90% 10% 0% 0% 4 0 0 0 12 10 20mA 20mA 4 0 0 0 12 10 20mA 20mA 2.5 5V 2.5 5V 5 10V 5 10V (Note1) F_1 is adjustable in a range from 0% to 90% of the rated value. (Default value : 0%0.00MPa) (Note2) F_2 is adjustable in a range from 10 to 120% of the rated value.

EX250-SCA1A_eng

The read resistance of one connector should be in the range of 2.5 to 10 m. Installation 1 0 The SI unit does not have mounting holes, so it cannot be installed alone. Make sure to connect the valve manifold. When an input block is not required, connect the end plate directly to the SI unit.

EX600-SPN_eng

Up to 10 units (including the SI unit) can be connected to one manifold. 3 4 3 4 RD4 Danger: Green ST(M) LED is flashing. Either of the following conditions: The valve ON/OFF counter has exceeded the set value. The valve is short circuited or disconnected. Red ST(M) LED is flashing.

EX600-SPN3_4.eng

Hold/Clear/Forced ON Fail safe Short circuit protection Protection -10 to 50 oC (Max. surrounding air temeprature rating: 50 oC) Operating temperature Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. (2)Add more I/O units. Up to 10 units (including the SI unit) can be connected to one manifold.

EXxx-OML0010CN

No.EX-OML0010CN-C / / EX600-HT1A 2 8 8 9 10 10 11 12 12 13 1. I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

PF2x2.eng

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

XMC/XYC Series

Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type XMC KF(NW),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW

XG_-OMV0028

ASSY O 0.70.9mm 4-3. 4-4. 4-5. 4-6. 4KPa (1) (2) 9 - (3) (4) (5) 4-7.O ASSYO 5 O O O 4-8. ,, 10 - 5.

Industrial Filter

(See Page 10: Replacement of element) 4. Fix the feet to the ground firmly using foundation bolts (M12). 5. The piping of IN/OUT shall be fixed firmly to the mounting frame using the saddle so that loads including vibration or weight are not applied to the piping. 3.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Bit 0 SSC1 Occurs when the output pressure is within 10% F.S. of the target pressure. 8 - Process data output: 4 BYTE (base module --> device (ITV)) This product uses process data to switch between Operation Mode and Standby Mode, and to set Control Stop. Bit No. Byte (Order) No.

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.

CM2x-OM0230Q

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 50~750 mm/s () 2. 2-1. AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1.