Series: 2 (VQZ200), Stations: 7 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 9 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 16 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 6 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 8 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 10 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 12 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 11 Stations, Port Size: 01T (NPTF1/8), Option: D (DIN Rail Mounting)

Battery-less

15 to 100 14 20 18 36 14.5 10 101 to 200 32 40 20 to 100 14 22 18 36 18.5 10 101 to 200 L CW CU RR +0.4 +0.2 CX 0.1 0.3 CZ Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Air Cylinder Series MB

to 150 50 50 50 50 50 50 40 201 to 300 100 100 100 100 100 100 80 301 to 400 125 125 125 125 125 125 100 401 to 500 150 150 150 150 120 501 to 600 175 175 140 601 to 700 200 701 to 800 73 81 89 89 101 101 120 801 to 900 200 200 160 901 to 1000 180 1 to 50 86 94 102 102 114 114 130 51 to 100 98 106 114 114 126 126 140 101 to 150 111 119 127 127 139 139 150 201 to 300 161 169 177 177 189

Table of Contents

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Environment

15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

Table of Contents

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

MGP

200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 Load weight m (kg)

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Vacuum Pressure Switch ZQ1-ZS A Vacuum pressure switch specifications Check valve Note 3) EA EB EC EE FA FB FC FE 0 to 101 kPa/NPN open collector 2 outputs, with suction filter 0 to 101 kPa/PNP open collector 2 outputs, with suction filter 0 to 101 kPa/NPN open collector 1 output + analog voltage, with suction filter 0 to 101 kPa/PNP open collector 1 output + analog voltage, with suction

Compact Guide Cylinder

mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more Bore size 12 7.5 7.5 10 19.5 22 4.5 2 3.5 3.5 6 23.5 26 1 16 9 7.5 10.5 19.5 22.5 4.5 1.5 5 3.5 6.5 23.5 26.5 1 20 13.5 13.5 15 25.5 27 9.5 9.5 11 29.5

5-Port Solenoid Valve

2 One-touch fitting 84 Double 94 2-position Single 82 Double 91 SY3l31-C2 3-position Closed center 98 Exhaust center Pressure center C2 2 One-touch fitting 3-position Closed center 95 Exhaust center Pressure center 4-position Dual 3-port valve 91 SY3l30-C2 2-position Single C3 3.2 One-touch fitting 87 Double 97 Metal seal SY3l31-C3 2-position Single 85 Double 94 3-position Closed center 101

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Part Number Description: ASSY MANIFOLD10-STA.'   Product Line: V   Product Line Description: VALVE   Family Code: 351   Family Description: VV*FS* MANIFOLD VFS SERIES   Class Code: PM   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Series SV

) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature C