Table of Contents

D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

MTS

) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47)

3

When mounted When mounted a) b) a) b) D-M9 D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V MK MK MK2T CK1 CLK2 CLKG CKQ CLKQ Auto Switch Proper Mounting Position (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V D-M9V D-M9WV D-M9AV CK CLK D-M9A D-A9 D-A9V Bore size (mm) D-M9V D-M9WV CKQ Hs Hs Bore size A B W A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

CATALOG VC10

K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 D No Option Ports T Metering (1/32 1/8 orif.)

High Vacuum Angle Valve

Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16

CRB2/CRBU2/CRB1

, D-R80, D-T79.

MY1

/Y7PV D-Y7W/Y7WV D-Y7BA D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA 5 5 5 5.5 5.5 5 5 5 5.5 5.5 Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(mm) Auto switch model Bore size Bore size Auto switch model 20 to 32 40 to 80 63 80 D-A9/A9V 20 25 32 40 50 8 9.5 8 8 8.5 9.5 9.5 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL Note) q BMP1-032 w BMG2-012 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMY3-016 4.5 4.5 5 5 5 6.5 6 D-Z7/Z80 D-Z7/Z80 D-Y5/Y7P D-Y7W D-Y6/Y7PV D-Y7WV D-Y7BAL 10 10 11 13 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL q BMP1-032 6 5 6

Air Slide Table Series MXS

D-A9V Solid state auto switch D-M9 D-M9V 2-color indication solid state auto switch D-M9W D-M9WV Extension end With buffer MXS 8 8 MXS12 12 Retraction end With end lock (Except for 6) MXH MXS16 16 MXU MXS20 20 Both ends Axial piping type MXS MXS25 25 MXQ Functional Options Adjuster Options MXF MXW Stroke Adjuster With Buffer Mechanism With End Lock MXJ Protects workpieces and tools

TABLE OF CONTENTS

2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 6, 10 3 3.3 12.2 15.2 1.2 0.3 16 4.8 5 18.3 22.7 1.5 0.7 20, 25 8.6 9 19.2 25 1.75 1.15 10-5-24

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

7.15 (7.54) Trunnion 120+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 110+55 (n4) 2 n=4, 8, 12, 16, 140+55 (n4) 2 n=4, 8, 12, 16, 130+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 25+55 n=2, 4, 6, 8, All mounting brackets (Except trunnion of iron tube) 0.22 (0.28) 0.28 (0.35) 0.37 (0.43) 0.52 (0.70) 0.65 (0.87) Additional Dif. sides 15 90 100 110 D-B5, B6 D-G5, K59 D-G5W K59W D-G5BAL D-G59F D-G5NTL weight

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

7.15 (7.54) Trunnion 120+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 110+55 (n4) 2 n=4, 8, 12, 16, 140+55 (n4) 2 n=4, 8, 12, 16, 130+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 25+55 n=2, 4, 6, 8, All mounting brackets (Except trunnion of iron tube) 0.22 (0.28) 0.28 (0.35) 0.37 (0.43) 0.52 (0.70) 0.65 (0.87) Additional Dif. sides 15 90 100 110 D-B5, B6 D-G5, K59 D-G5W K59W D-G5BAL D-G59F D-G5NTL weight

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.