SMC Corporation of America
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Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Prevention of electric shock and fire Do not operate the switch with wet hands. Also, do not operate the Thermoelectric Bath with water or fluid left on it. 2. Action in the case of error If any error such as abnormal sounds, smoke, or bad smell occurs, cut off the power at once, and stop supplying facility water.

Do not apply a force of 20 N or more to the lead wire.

10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Lead wire length symbols 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Refer to page 14 for additional details and applicable auto switches other than the above types.

49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or more 22 or more 17 or more 54 or more 52 or more Auto Switch Mounting Height Atmosphere General use Mounting Rail mounting Rail mounting Welding Direct mounting D-A7 D-A80 D-A7H D-A80H D-F7BAL D-F7W D-J79W D-F7NTL D-F79F D-F7D-J79 D-F7WV D-F7BAVL

17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

HECR 5-14 MODBUS communication function 5.10.3 Control operation mode The control operation mode is assigned as follows.

After starting 475 field communicator's OS, synchronization with the Air Servo Cylinder automatically starts. 14 10.

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. P1 = 0.1 MPa 0.04 0.04 0.02 0.02 Selection Warning 0 0 15000 10 5000 0 2000 4000 6000 0 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Piping 1. Do not introduce air from the outlet side as this can damage the damper. 1.

With double acting spring 20 14 32 20 50 32 63 40 63 40 80 Bore size (mm) Rod size (mm) 50 Standard stroke (mm) Standard variations Series Variations Option Bore size (mm) 15 20 30 40 Rod end shape Series Mounting type Actuation system Built-in magnet With lock mechanism With proximity sensor With cancel 20 32 Double acting RSH Adjustable Flange Lever Double acting spring type 50 63 80 RS1H

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

Do not use a tool when rotating the handle. When the handle is rotated with a tool, it may apply excessive torque to the handle or inside the valve body and it may cause damage. Rotate the handle by hand. 9. When locking the valve with LOTO feature in the closed position, use safety lockout hasp.