Compact Slide Series MXH

0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.0-33 to 0-36 for Safety lnstructions and common precautions. Caution Warning How to Use L and M Plug Connector Manual Override Without an electric signal for the solenoid valve the manual override is used for switching the main valve.

3

0 !1 !2 q w e r t y !1 !0 o i u Component Parts No.

Air Cylinder

0 1 1 0 0 9.5 8.5 5.5 4.5 3 2 5 4 2.5 1.5 6 5 3.5 2.5 11 10 0 0 1.5 0.5 0 0 12.5 11.5 8.5 7.5 6 5 3 2.5 5.5 4.5 9 8 6.5 5.5 14 13 2.5 1.5 4.5 3.5 3 2 16.5 13.5 12.5 9.5 10 7 7.5 4 9.5 6.5 13 10 10.5 7.5 18 15 6.5 3.5 8.5 5.5 7 4 100 18 16 14 12 11.5 9.5 9 6.5 11 9 14.5 12.5 12 10 19.5 17.5 8 6 10 8 8.5 6.5 Note) Adjust the auto switch after confirming the operating conditions in the actual

Water-cooledThermo-chiller

15 15 Return port pressure 0 0 0 5 10 15 20 25 30 35 40 45 50 55 60 0 2 4 6 8 10 12 14 16 18 20 Flow rate (L/min) Flow rate (L/min) If the circulating fluid flow drops below 2.1 gpm (8 L/min)., the shutdown alarm activates and operation stops.

Power Clamp Cylinder

0 5 10 15 20 0 450 400 350 300 250 200 150 100 50 0 Arm length L (mm) Arm length L (in) Allowable load for clamp arm end Refer to the graph on pages 190 and 191 for parts weight of the arm.

Slider Type/Ball Bushing Bearing

Refer to the Specific Product Precautions for the replacement period. 1517 A CY1L Series Construction Slider type/Ball bushing bearing CY1L6 $0 #9 #3 @2 t #4 !9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

HRX-OM-X027

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.4-1 Cooling capacity(HRS050-A-20-R) 9.5 Heating capacity 2000 2000 Ambient 45oC 1500 1500 Ambient 40oC Ambient 45oC Heating Capacity [W] Heating Capacity [W] Ambient 40oC 1000 1000 Ambient 32oC Ambient 25oC Ambient 32oC Ambient 25oC 500 500 Ambient 5oC Ambient 5oC 0 0 0 10

MONOSASHI-KUN WITH BRAKE CONTROLLER

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN69 and COM 1Short Circuit between IN69 and COM Set Home When dip switch No.1 is set ON, origins signal is inputted.

LA-OMP0023

5 20 40 5 20 40 2 1 1 0 0 0 20 40 60 80 100 0 20 40 60 80 100 Duty [%] Duty [%] Fig. 4-3 Allowable thrust force setting values.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

+0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 15 M3 x 0.5 7 4 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 19 M3 x 0.5 9.5 4.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25 15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052

CS1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

Table of Contents

100 0 VQ014C4 0 1 VQ11 -C6 0 1 3 4 7 VQ214C8 0 1 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ 800 700 600 500 400 300 200 100 0 VQD VQ2149-C8 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

1 Rubber seal 0.43 25 or less 27 or less 7.2 2.1 27 or less 7.3 0.38 2.0 0 5 0 5 VQ42 0 Metal seal 0.19 12 or less 14 or less 6.2 1.5 14 or less 6.9 0.17 1.7 0.26 (0.32) Double VQ42 1 Rubber seal 0.43 15 or less 17 or less 7.2 2.1 17 or less 7.3 0.38 2.0 0 5 VQ43 0 Metal seal 0.23 45 or less 47 or less 5.9 1.5 47 or less 6.3 0.18 1.6 0.28 (0.34) Closed center 0 5 VQ43 1 Rubber seal 0.34

90

flow (Port exhaust) Vacuum pressure 60 40 Suction flow (Silencer exhaust) Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 50 60 Suction flow [L/min (ANR)] ZK212 Flow-rate Characteristics Exhaust Characteristics 0 10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure

Sine Cylinder Series REC

0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.