Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

port] Applicable tubing O.D.: 8 9 60 37 26 For top ported 4 4 4 4 4 4 4 4 3 R P 1 2 2 2 2 2 2 2 2 7.5 13.1 29.6 58.1 43.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21

Series AK1000

MPa) Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

15.6 32 AS33l1F-U02-12A 12 18.5 42.5 28.3 64.7 17 34 AS33l1F-U03-06A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 1/4 19 50 48.4 43.6 42 AK 13.3 31 AS33l1F-U03-08A 8 13.2 37.1 23.5 52.2 14.2 AS33l1F-U03-10A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 32 AS33l1F-U03-12A 12 18.5 42.5 28.3 57 17 34 AS43l1F-U04-10A 10 1/2 24 15.9 17.4 18.8 25.6 46.4 26.1 61.2 50.8 49.2 42.2 40.6 15.6 54 AS43l1F-U04-12A 12 18.5 21

Air-hydro Unit

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Flow control valve Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

+0.030 4H9 0 depth 4.5 K cross view (Closed) +0.052 32H9 0 depth 1.5 Auto switch mounting groove (4 locations) 76 Width across flats 13 (4 locations) M5 x 0.8 (Finger closing port) 2 x M5 x 0.8 Vacuum port M5 x 0.8 (Finger opening port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port Finger opening port 4 x M4 x 0.7 thread depth 8 Finger closing port Finger opening port (A, B common view) M5 x 0.8 thread depth 5 Vacuum suction port +0.02 0 2 x 4 depth 8 44 Auto switch mounting groove (A, B common view) 14h9-0.043 0 18 1.5 55.5 9 24.6 2-3 3.4 4.7 37 (60) 21

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21

Information

27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Compact Cylinder

Single knuckle joint material: Rolled steel Surface treatment: Nickel plated Double knuckle joint material: Rolled steel Surface treatment: Nickel plated Knuckle Pin (Common with Double Clevis Pin) Double Clevis Socket Dd9 2 x l 2 x (mm) Dd9 L 21 23 27 31 d 7.6 7.6 9.6 9.6 Part no.

Rotary Actuator/Vane Style Series CRB2

MSZ 2 20 CRQ2X MSQX 0 -0.030 4 6.5 10 MRQ 30 45 Body B (90) h Keyway dimensions b l Body A h (h9) l b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2 x M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE 10g6 -0.005 -0.014 0 -0.052 25h9 B port A port 63 20 2 x M5 x 0.8 Connection port for side port 21 D3 x 5.5 depth 17.5 (Body A side only) 3 x 5.5 depth

20

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Pg7 Max.10 74.6 16 33.8 33.5 37 30.5 Manual override part IN OUT Breathing hole (6.2) 13.7 OUT 2 1 IN 3 EXH 71 EXH 32 2 x M4 x 0.7 thread depth 8 (for bracket mounting) Applicable cable O.D. 3.5 to 7 Details of manual override part (for manual operation) 50.8 43.3 Type A 25 6.5 49 (20) G3/8 [3(R) port] (21) Type E 48.9 LOCK PUSH 4 VP500/700 Series Dimensions VP717 Mounting hole (for M8)

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

60 Hz) 12 W Allowable voltage fluctuation DC AC Inrush Holding Apparent power Note) Power consumption Note) DC Semi-standard Note) At rated voltage Flow Rate Characteristics/Weight Weight (kg) 1 2 (IN OUT) 2 3 (OUT EXH) Flow rate characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

1

Special electrical entry direction 2 XSA Series Specifications Model XSA1-11 2 XSA1-21 2 XSA2-22 XSA2-32 XSA2-43*3 XSA3-32 3 XSA3-43 Action Normally closed Fluid Air, Inert gas Orifice diameter mm 2 3 4.5 6 4.5 6 Withstand pressure MPa(G) 1.5 Minimum operating pressure Pa(abs)/OUT side 1 x 106 Maximum operating pressure MPa(G)/IN side 1.0 Maximum operating pressure differential MPa *1 0.8

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.

Bernoulli Gripper

Body material 30 Nil 30 23 8.7 27 34 M3 x 0.5 6 8.5 3.3 10.5 2.2 8.5 0.8 11.3 11.8 2 4.2 0.8 2.8 27 P 17 S 77 ZNC 40 Nil 40 32 11 3.5 34 42.2 44 48 P 30 S 139 M4 x 0.7 8 11.5 3.6 13.5 2 8.5 1.0 10.5 12 3 5 1 5.8 60 Nil 60 47 21 10 54 64 110 P 67 S 323 *1 The stopper, vibration suppression cover, and plug weights are not included. 13 Bernoulli Gripper ZNC Series Dimensions: 80 Basic type