PFxx-OMO0007CN

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

Digital Flow Switch (Remote type monitor unit)

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LFE-OMZ0013

Doc.No.LFE*-OMZ0013 Product Name Flow Monitor Model/ Series/ Product Number LFE0### SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting

Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 13 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2.

Process Pump

PAB-OM-B005-A PRODUCT NAME Process Pump MODEL / Series / Product Number PAX112 Series Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 10 Applicable Fluids P.11 Specifications P.12 Performance Curve P.13 to 14 Working Principle P.15 Maintenance Parts P.16 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are

Process Pump

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 13 How to Order 14 8.

Process Pump

Sensor mounting (leakage sensor) -P.13 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

IBV-OMY0015

Length (mm) Peak pressure (compared with existing product) 8 2000 2 times 10 1300 2.5 times 13 800 3 times In SMC test conditions. Refer to page 5 for the relation between the upstream piping and peak pressure. Oscillation may occur when supply air is insufficient. Upstream piping I.D. Must be larger than 8. Be careful that pressure drop does not occur. 2 4.

VN-OMP0002

O O O 12 13 14 8 VN-OMP0002 Revision history 1st printing : Py 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN-OMP0002

XL-OMY0001

XL-OMY0001 L // XLA-2 2 11 4 , 2.2 5 , , , , 33 7 4. 9 5 11 6. 13 7 14 1 XL-OMY0001 *1) *2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

(Refer to Section 6 Parts Replacement Procedure (pages 10 to 13) for details.) Piping Caution Maintenance Warning Caution 4 XL-OMO0001-A 2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution The bonnet assembly should also be replaced when changing the seal material.

XL-OMY0002

No.XL-OMY0002 L // XLD XL-OMY0002 2 11 4 , 2. 2 5 , , , , 33 7 4 9 5 11 6 12 7 13 8 14 9 15 10 16 1 XL-OMY0002 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements

High Vacuum L Type Valve

(Use dust-free gloves.) 13 XL*-OMJ0005-C Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface.

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

XMH/XYH Series

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMH KF(NW),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13

Industrial Filter

SUS316WPA Stabilizes the element seal (7) Element holder FGE-OP005 SUS316 Seals the element (8) Element guide SUS304 Guides the element (9) Tension bolt SUS304 Shaft to fix the element (10) Element Assemble elements into this (11) Joint FGD-OP001 SUS316 Seal the space between element FGE-KT001 NBR (12) O-ring FGE-KT002 FKM O-ring used to seal the sealing part of the cover and the case (13

Return Filter

1 / 17 FGX-OM-F001-A PRODUCT NAME Return Filter MODEL / Series / Product Number FH100 Series FH100 X0 Series 2 / 17 FGX-OM-F001-A Contents Safety Instructions 1 1.How to Order 9 2.Construction and names of individual parts 10 3.Specifications 11 4.Installation and Piping 12 5.Maintenance 13 6.Maintenance parts 14 3 / / 17 FGX-OM-F001 FGX F001-A Return Filter Return Filter Return Filter Safety

PSxx-OMG0005CN

kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13

Pressure Sensor for General Fluids

No.PS-OMT0006-C PRODUCT NAME Pressure Sensor for General Fluids MODEL / Series / Product Number PSE575/576/577 Table of Contents Safety Instructions 2 Model Identification and How to Order 8 Names of Parts of Product and Handling Precautions 9 Mounting and Installation 10 Wiring 10 Troubleshooting 12 Specification 13 Specifications 13 Dimensions 15 -1No.PS-OMT0006-C Safety Instructions These