HRL

7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating fluid system Pump capacity Particle filter nominal filtration rating (Accessory) [m] 5 Circulating fluid outlet, circulating fluid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1

Basic Type/Direct Mount Type

26 30 46 42 28 32 48 44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

CHKD/CHKG

mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63 42

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30 60 9.5 11-/22-MXP6-10 834 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP10 11222 x M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2 x M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42

15

10 46 11.5 23 62 16 1 CY1S10-Z M8 x 1 RJ0806HN M4 x 0.7 M50.8 25 38 61 60 5.5 11 47 12.5 58 14 28 72 1 24 CY1S15-Z M8 x 1 RJ0806LN M4 x 0.7 M50.8 30 50 76 75 5.5 11 62 12.5 73 14 28 87 30 1 CY1S20-Z M10 x 1 RJ1007LN 40 70 90 90 4.5 9 73 16.5 87 18.5 37 106 M6 x 1 Rc1/8 NPT1/8 G1/8 38 1.5 CY1S25-Z M14 x 1.5 RJ1412LN 73 M6 x 1 Rc1/8 NPT1/8 G1/8 40 70 99 90 4.5 9 16.5 96 18.5 37 106 42

Vacuum Pad

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

MGQ

30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 MX 20 MTS 25 MY 32 40 CY 50 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Model: 3 (10-SY3000), Stations: 03, A, B Port: N7 Applicable One-touch Fitting for ø1/4")

Model: 3 (10-SY3000), Stations: 03, A, B Port: N7 Applicable One-touch Fitting for ø1/4"), Thread: T (NPTF)

Model: 5 (10-SY5000), Stations: 03, A, B Port: 02 (1/4)

Model: 3 (10-SY3000), Stations: 03, A, B Port: 01 (1/8), Thread: N (NPT)

Model: 3 (10-SY3000), Stations: 03, A, B Port: 01 (1/8)

Model: 5 (10-SY5000), Stations: 03, A, B Port: 02 (1/4), Thread: N (NPT)

Stations: 03, A,B Port: N11 (ø3/8" One-touch Fitting, Inch)

Stations: 03, A,B Port: 02 (1/4), Thread: N (NPT)

Stations: 03, A,B Port: 02 (1/4), Thread: T (NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 3 Stations, A, B Port: 02F (G1/4), CE Marked: Q (CE Marked)