XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

Air Catch Sensor

Station L1 L2 2 110 3 145 36 4 180 71 5 215 106 6 250 141 Unit Manifold With DIN rail Deflection level indicator Terminal block box 35 40 L1 Deflection level indicator 75 40 Terminal block box Rc1/8 SUP. 25 DIN rail center 70 (94.4) 90 25 (94.4) SUP 70 4.5 90 40 (4.5) 30 4.5 Adjusting knob Gauge Electrical entry Applicable O.D. 6.5 to 8.5 12 L2 L3 Gauge 105 Electrical entry Applicable O.D

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

New

B 0.03 60 50 40 0.02 VXFA24A VXFA24A 30 0.01 20 10 0 0 500 0 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm) Piping length to the pilot valve (mm) 0.05 100 90 0.04 80 Start-up speed (MPa/msec) ON response time (msec) VXFA28B VXFA26< VXFA27B 70 0.03 60 50 VXFA26< 0.02 40 VXFA27B 30 VXFA28B 20 0.01 10 0 0 0 500 1000 1500 0 500 1000 1500 Piping length to the pilot valve (mm)

VCA

48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4

Compact Cylinder Double Acting, Single Rod JCQ Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

NCQ8

mA Load current 40 mA or less 0.8 V or less 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Red LED lights when ON.

AIR CYLINDER

Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5. Troubleshooting P.23 6. Construction P.26 7.

LEC-OM034xx

Enter "password". 18 - (2) Set the controller so that the communication speed can be changed. Change "Parameter protect" setting so that "Communication speed" parameter can be changed. View the parameters of the controller. (2)-1 Change parameter protect to [3: Common + Extend + Step]. (2)-2 Select Download.

Fieldbus system (PROFIBUS DP compliant)

20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Air cylinder

Name Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 2 7 Bushing 1 8 Cushion valve 2 9 Tie rod 4 10 Tie rod nut 4 11 Snap ring 2 12 Wear ring 1 13 Rod seal 1 14 Cushion seal 2 15 Piston seal 1 16 Cushion valve seal 2 17 Cylinder tube gasket 2 18 Magnet (1) 30 - Figure-5 180 to 250 Table.14 Parts list No.

KK/KK13

Female thread type T D H L L (mm) T Connection female thread H Width across flats Effective area mm D L When connected 38.5 Body size L Min. bore Weight g Model KK3S-01F Rc 1/8 1/8 8.2 22.4 20.6 18.2 36 14 KK4S-02F Rc 1/4 10.9 54.1 54.1 36.6 50.4 1/4 25.4 19 -03F 54.8 43.4 42.7 51.1 Rc 3/8 14.4 KK6S-03F 63.9 91.2 80.9 58.6 1/2 31.2 24 -04F Rc 1/2 18 66.3 85.0 81.6 61 Nut fitting type (for

S Couplers Series KK/KK13

Female thread type T D H L L (mm) T Connection female thread H Width across flats Effective area mm D L When connected 38.5 Body size L Min. bore Weight g Model KK3S-01F Rc 1/8 1/8 8.2 20.6 22.4 18.2 36 14 KK4S-02F Rc 1/4 10.9 54.1 36.6 54.1 50.4 1/4 25.4 19 -03F 54.8 42.7 43.4 51.1 Rc 3/8 14.4 KK6S-03F 63.9 80.9 91.2 58.6 1/2 31.2 24 -04F Rc 1/2 18 66.3 81.6 85.0 61 Nut fitting type (for

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

CEx-OMQ0010

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Card Motor

Refer to the dimensions on page 5 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimensions (mm) No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 L dimension 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5