Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), Port Size: ø4 One-touch Fitting, Type 43, Thread: -

Piping: Body Ported, Stations & Port Location: 13 Stations (Type 20, 21, 41, 42), Port Size: -, Thread: -

Piping: Body Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), A, B Port: NPTF

Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), A, B Port: Base Mounted M5X0.8

Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), A, B Port: NPTF1/8

Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), A, B Port: NPTF5/32 One-touch Fitting

Piping: Base Mounted: Side Ported, Stations & Port Location: 13 Stations (Type 20, 41, 42, 43), A, B Port: NPTF1/4 One-touch Fitting

Piping: Body Ported, Stations & Port Location: 13 Stations (Type 20, 21, 41, 42), Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 13 Stations (Type 20, 21, 41, 42), Port Size: NPTF1/8

Piping: Base Mounted, Stations & Port Location: 13 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 1/4" Tube

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. DM KDM Caution KB 1. Implement the tube piping in such a way that lateral load should not be applied on the ball bearings at the rotating part, otherwise it may adversely affect the life expectancy. A flexible polyurethane tube is recommended when lateral load is applied.

Silencer Metal Case Type Series 25

Flow Characteristics (Initial conditions) Refer to page 5-10-13 for Precautions on these products. 2504 to 2511 1 Model 0.5 A B D Dimensions (mm) Recommended flow (m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106

Vacuum Filter AFJ Series

35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S A (mm) A AU AV AW AX AY BA BB Size 1 YA 1 28 2.8 11 8.2 5.5 1.5 35 39.6 2 30 3.6 12.6 9.2 7 2 37 45.1 3 34.5 4.4 15.5 10.5 8 2.5 43 46.7 7 41 4.8 18.4 12.2 10 3 50 59.2 YB effective depth YC (mm) BC BD BE BG BH BI BJ BK D DD DE FA FB FD H J JA JB JC JD JE JF JG Size M4 x 0.7 M4 x 0.7 1 4.5 32 17 11 8.2 30 4.5 5.3 27h9 27.5h9 14H9 4.8 2 3.7 9 3.3 6 3.5 2.2 5.3 4 M4 x 0.7 M4 x 0.7 2 5.5

High Pressure Coolant Valve

Proof pressure Ambient temperature Max. operating frequency Mounting position Port size Orifice diameter (mm) Flow rate characteristics Kv Conversion Cv Pilot port size Weight (kg) Face-to-face dimension (mm) 5.5 MPa 10.5 MPa 5 to 50C Note 1) 20 times/min Vertical upwards 1 2 3 8 3 4 1 3 8 1 2 3 4 1 3 8 1 2 3 4 1 7.1 8.7 10.6 14.3 3.9 5.2 6.2 7.3 8 9.5 13 15.7 1.9 3.6 4.5 7.8 0.6

3 Port Air Operated Valve VPA3145/3165/3185 Series

2 132 14 80 95 140 52 140 41 81 105 2 1575