Vacuum Pad

2.5 3 6 2.5 3 6 2.5 3 11.5 11.5 11.5 0.8 0.5 0.8 1.2 1.8 1.8 6 8 4 4.5 6.5 8.5 ZP3-T04UM;-B5 [Weight: 2.3 g] ZP3-T06UM;-B5 [Weight: 2.3 g] ZP3-T08UM;-B5 [Weight: 2.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 Width across flat 7 Width across flat 7 Width across flat 7 5 0.8 5 0.5 5 0.8 13.5 13.5 13.5 6 6 6 1.8 1.2 1.8 4 6 8 6.5 8.5 4.5 5 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

VNH

2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J MM NN R FC FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 M3 x 0.5 7 3.4 1.6 24 16 32 M10 x 1.0 10 10 12 15 17 5 13 8 6 7 20 7 M4 x 0.7 8 4.5 1.6 28 18 37 M12 x 1.0 15 12 14 20 19 6 15.5 10 6 7 24 9 M5 x 0.8 10 5.5 2.3 36 22 49 M14 x 1.0 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

Modular F.R.L. Units

AD17-6-A AD27-6-A With bowl guard AD27-6C-A AD37-6-A AD47-6-A Normally open (N.O.) With bowl guard AD38-6-A AD48-6-A Automatic 1 Manual With drain cock C1SF-2-A C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SF-2J-A C3SF-2J-A C4SF-2J-A With level gauge C3LF-8J-A C4LF-8J-A Metal Normally closed (N.C.)

ZP3

3 Pad diameter Buffer specifications 78.5 3 6 10 15 20 46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

Air-hydro Unit

Turbine oil of ISO VG32 (Example) Idemitsu Kosan Co., Ltd.: Turbine oil 32 Nippon Mitsubishi Oil Corp.: Turbine oil 32, Mitsubishi turbine 32 Idemitsu Kosan Co., Ltd.: Dufny turbine oil 32 Nippon Mitsubishi Oil Corp.: FBK turbine 32, Diamond turbine oil 32 1176 VNA Series/Process Valve 2 Port Valve For Compressed Air and Air-hydro Circuit Control Related Equipment

11-cuk-e

Contents Bore size (mm) CU10S-PS CU16S-PS CU20S-PS CU25S-PS CU32S-PS 10 16 20 25 32 CU10S-PS CU16S-PS CU20S-PS CU25S-PS CU32S-PS Gasket @3 @4 NBR Piston seal Set of left nos. @3, @4. 6 cannot be repaired. Seal kit includes @3, @4. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g).

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZR IN side, OUT side (/min (ANR)) Weight (g) Model ZM ZFC100-04 4 10 11.5 ZFC100-06 6 20 ZH Metric size ZFC200-06 6 30 21.5 ZU ZFC200-08 8 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY

IDX-OM-M051

References 6 1 Specification table . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Outer dimensions . 6 3 6 4 Electric wiring diagram . 6 6 6 5 Pneumatic and refrigerant circuits and their functions . 6 7 6 6 Consumable parts and regular maintenance parts . 6 8 Chapter 7 Service Record 7 1 Service Record . 7 1 Table of Contents 2 IDX-OM-M051 Air Dryer i Safety Instructions Safety Instructions

EXxx-OML0010CN

(Parameter Default) 32 6. (Clear Error Log) 32 -27No.EX-OML0010CN-C 1. 1. Tag Input (23 ) -28No.EX-OML0010CN-C 2. EX600 (SI SW ) SI SW Re Register 2. Re Register PROFIBUS DPSI -29No.EX-OML0010CN-C 3. Hold/Clear Hold/Clear SI PLC Hold/Clear 3. Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4.

MGZ Series

to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches Auto switch models Auto switch type Electrical entry D-Z7, Z80 Grommet Reed switch D-Y59

Soft Start-up Valve AV2000/3000/4000/5000

37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000

ZQ-OM01601

kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1) P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 28 - [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] 29 - [F11] <> [F11

4/5 Port Air Operated Valve SYJA3000 Series

20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (Piping port) 24 21 2 x 1.3 (Breathing port) 32 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 2 x 4.3 (For mounting) 37.5 4 2 x M5 x 0.8 (Pilot port)

11-cqp2-e

6 Single acting, spring extend Piston seal CQ2B12-T-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS CQ2B16-T-PS Gasket CQ2B20-T-PS Set of left nos. !4, !5, !6. CQ2B25-T-PS Replacement Parts: Seal Kit Kit no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 6 Cassette Type Manifold Series SZ3000 Manifold Options DIN rail dimensions/Weight table D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below in the .

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

3 38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60