Air Cylinder RSQ Series Stopper Cylinder polyurelhane tube Seal Kit-How to Order RSory-P"t [,"; Hri'lj,ffL 20 32 40 50 Construction/parts list Fixed mounting heisht SgfieS RSO Ooubfe acling . double acling wift spring . rolle( rd end Lever rod end wi(h buillin shock absorber (only 032, 440, d6o) d20 032.d40.C60 Round bar fod end type (D) Non rotaling rod end type (K) Single acting/roller rod end Q20 Only 1 roller is provided for 032 N2
If the fluid also generates corrosive gas, perform N2 supply and exhaust (N2 purge) inside the heat exchanger. 3. Caution for the use of deionized water If deionized water is used, bacteria and algae may grow in a short period. If the Chemical Thermo-con is operated with bacteria and algae, the performance of the heat exchanger may deteriorate.
) 2 (Different surfaces, same surface), 1 15 D-M9 D-M9W D-M9AL 15 + 55 (n2) 2 (n=2, 4, 6, 8) 25 + 55 (n2) 2 (n=2, 4, 6, 8) n (Same surface) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n 1 10 25 2 (Different surfaces, same surface), 1 2 (Different surfaces, same surface), 1 15 10 D-M9V D-M9WV D-M9AVL 10 + 30 (n2) 2 (n=2, 4, 6, 8) 15 + 40 (n2) 2 (n=2, 4, 6, 8) n n 2 (Different surfaces) 2 (Same surface)
EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.
(mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!. i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V.
L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 385.5 398 398 410.5 423 435.5 235.5 248 260.5 273 285.5 298 298 310.5 323 335.5 348 360.5 360.5
2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).
resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)
Flow control of N2 gas to detection camera shimmering for prevention of lead frame oxidation Flow rate control of high frequency electric power supply cooling water for wafer temperature regulation l/min is used as the flow rate indicator unit on this flow switch, and the mass flow is converted and notated under conditions of 0C and 1atm.
) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n
Applications Pressure feed of chemical liquids Water trap Fluid temperature control Fluid outlet Discharge of chemical liquids N2 Mounting to the piping and/ or fluid passage Fluid inlet LQ series Male connector LQHB series Bore through connector LQ series Male connector LQHB series Bore through connector LQHB series Bore through connector Temperature sensor Fluid LQ series Male connector
Only air, N2, are applicable. [ 25] 25 L/min (PFMC7501) End stop position Set value [P_1] [ H_1] Hysteresis of OUT1 [ 50] 50 L/min (PFMC7102) Hysteresis [H_1] 225o [ 100] 100 L/min (PFMC7202) Flow [L/min] Do not use the product in a place where static electricity is a problem.
Only dry air, N2, CO2 and Ar are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.
serial transmission L1 = 12.5 x n1 + 16 x n2 + a + b x n3 L2 = 12.5 x n1 + 16 x n2 x 48 M = L1/12.5 + 1 Decimal fractions are truncated.
resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)
Same side Same side 110C K Heat resistant tarpaulin D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75
~imension W , :1 . ' ' ,~:~\ '-tg" size ( mm) ~ I~ I~ 20(,1) 1 3)(stlI5(Sl) lQ I~ 2O(,t) 1 3)(SI) 5, 10, 15, 2OlSiili;:~ 5",1 Q, IS; 2Q\si) [:n(SI) I 0 <
Applications and Circuit Examples Cartridge type Cartridge type Disposable type Disposable type Refrigerated air dryer Heatless dryer Super mist separator After-cooler Air source Gas filtration and gas flow Odor removal filter Air tank Main line filter Mist separator Micro mist separator SFB3 SFC1 Micro mist separator with prefilter Membrane air dryer N2 gas SFB3 SFC1 SFA, SFB1 Clean blow
(When reversed output is selected, the sub display (left) shows [n1/n2].) : Set OUT2 in the same way. : Setting of the normal/reverse output switching and hysteresis/window comparator mode switching are performed with the function selection mode [F 1] Setting of OUT1 and [F 2] Setting of OUT2. Snap shot function The current flow value can be stored to the switch output ON/OFF set point.
When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 1. Use clean air. Do not use compressed air which includes chemicals, syn thetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction. 2.