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XGT222-32222-1

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT222-32222-1

XGT222-46236-1

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT222-46236-1

XGT223-46236-1

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT223-46236-1

XGT312-50336-1

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT312-50336-1

XGT313-50336-1

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGT313-50336-1

XGTP313-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP313-50336-1

XGTP311-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP311-50336-1

XGTP312-50336-1

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XGTP312-50336-1

LVQ20-V06R-1

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 06 (ø6), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ20-V06R-1

LVQ20-V06N-1

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 06 (ø6), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ20-V06N-1

LVQ20-V07N-1

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ20-V07N-1

LVQ40-V13N-1

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ40-V13N-1

LVQ60-V25N-1

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 25 (1" or ø25), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ60-V25N-1

LVQ40-V13-1

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ40-V13-1

LVQ30-V11N-1

Body Class: 3 (ø8 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 11 (3/8"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ30-V11N-1

LVQ40S-V13N-1

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 13 (Tubing O.D. 1/2), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ40S-V13N-1

LVQ60S-V25N-1

Body Class: 6 (ø22 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Fitting Size: 25 (Tubing O.D. 1), Pilot Port Thread: N (Thread Type 1/8"NPT), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVQ60S-V25N-1

LVD10-S03-1

Body Class: 1 (Orifice Dia. ø2), Valve Type: 0 (N.C.), Applicable Tubing Size: 03 (ø3mm or 1/8"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 1 (With Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD10-S03-1

LVD11-S03-1

Body Class: 1 (Orifice Dia. ø2), Valve Type: 1 (N.O.), Applicable Tubing Size: 03 (ø3mm or 1/8"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 1 (With Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD11-S03-1

LVD30-S03-1

Body Class: 3 (Orifice Dia. ø8), Valve Type: 0 (N.C.), Applicable Tubing Size: 03 (ø3mm or 1/8"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: One Touch Fitting Class 1: ø4, Class 2~5: ø6, Pilot Port Position: None (Position 1), Material: Standard, Option: 1 (With Flow Rate Adjustment)

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/LVD30-S03-1