CUJ

Table 1 Standard strokes Lead wire length (m) Applicable load Auto switch part number Electrical entry direction Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action Load voltage Electrical entry Indicator light Wiring (output) Special function Double acting Type 0.5 (Nil) 3 (L) 5 (Z) DC AC In-line Perpendicular

HRX-OM-R026

Release the alarm referring Chapter 6.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

tubing A B C Model Number of distribution ports Applicable tubing A B C VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 6 VB4-6 VB6-6 VB8-6 4 6 8 74 102 130 96.5 124.5 152.5 62 90 118 82.5 110.5 152.5 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Flow Control Equipment

8 10 12 12 10 6 8 10 Tube O.D.

HRX-OM-W058

OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option T [High-pressure pump]. 6-3 6.4.1 Option T [High-pressure pump] . 6-3 6.5 Option V

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

ISA2

9 6 9 6 9 6 9 6 9 IN IN IN 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Right Right Left Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NPL-1D1 set (1 station manifold part number

21

5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5 2 1 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 12 12 8 8 2.5 2.5 8.5 5.5 5.5 2 2 7.5 7.5 4 4 8.5 Note 1) Adjust the auto switch after confirming the operating condition in the actual setting.

240

MXH10 0 0.005 0.01 0.015 0.02 0.025 0.03 0.035 0.04 0.045 0.05 0 0.5 1 1.5 2 2.5 3 3.5 Roll moment Mr (Nm) MXH16 0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0 1 2 3 4 5 6 7 Roll moment Mr (Nm) MXH20 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18 0 2 4 6 8 10 12 Roll moment Mr (Nm) 22 Compact Slide MXH Series Construction MXH MXH !2 !3 !1 t y u i !4 w q !

HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

IDX-OM-W031

IDFA Series 6-1 Specifications 6 1 IDX-OM-W031 Air Dryer 6 References 6-3 Dimensions IDFA22EIDFA37E IDFA55EIDFA75E Measuremm Model Port Size A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 Dimensions 6 2 IDX-OM-W031 Air Dryer

IDX-OM-W032

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-

Line filter

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AM20 159. 6 159. 4 146. 1 142. 1 148. 6 AM30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AM40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: September 2020 Addition

Micro Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

SMC Wireless System EtherNet/IP ® compatible

Replace the valve and check the operation. (5)-3 Short-circuited output load (5)-4 Analogue I/O upper and lower set limit exceeded (5)-5 Analogue Input range upper and lower limit exceeded (5)-6 ON/OFF operations has exceeded the set value (6) Valve diagnostic information detected. (6)-1 Valve short-circuited. (6)-2 Broken valve wire (1) Check the number of input/output points allocated

0.01

9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) Prefix the part number of the air

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

IDX-OM-W026

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3