VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Air Cylinder NCJP Series Pin Cylinder

,) ols (%') Series NCJP Dimensions Clevb irounv NC JPD 0.81 0.24 No.5-40UNC 66 (i4\ Note: Clevis pin must be ordered separately. 0.36 No.10-32UNF O15 {s/b") y.6 ('. ") 0.88 0.188 ; d 15 (eb) Series NCJP Trunnion Mount/ iICJPT NN re-24UNF tC (Ya") ei-1BUNF Note: Includes trunnion pin and 2 retaining rings. 0.24 0.67 1.06 0.36 115 (tbl d6 l1i) 115lsh") o Series NCJP Accessories rrND DIA

Series PF2W Digital Flow Switch For Water

U P S E T MODE DOWN Use to change the mode or to increase the set value. UP button ( button) Use to select the function. SET button ( button) DOWN button ( button) Use to change the mode or decrease the set value.

F/ISE

ZSE50F / ISE50 1 x 10 -5Pam3/s ZSE60F / ISE60 1 x 10 -10Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of work pieces containing water To confirm primary pressure of cleaning line Features 1 High precision and high resolution 1/2000 (0.1kPa) Positive

NGIP seies

,) ols (%') Series NCJP Dimensions Clevb irounv NC JPD 0.81 0.24 No.5-40UNC 66 (i4\ Note: Clevis pin must be ordered separately. 0.36 No.10-32UNF O15 {s/b") y.6 ('. ") 0.88 0.188 ; d 15 (eb) Series NCJP Trunnion Mount/ iICJPT NN re-24UNF tC (Ya") ei-1BUNF Note: Includes trunnion pin and 2 retaining rings. 0.24 0.67 1.06 0.36 115 (tbl d6 l1i) 115lsh") o Series NCJP Accessories rrND DIA PIN

-- NCM seies

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

DIN (EN175301-803(C)) terminal Z With light/surge voltage suppressor *1 For AC voltage valves there is no S option.

Ozone Resistant

Molecular structure Basic molecular structures Rubber type Basic molecular structure (-CH2-CH=CH-CH2-)x (-CH2-CH-)y I CN NBR (acrylonitrile-butadiene rubber) (-CH2-CH2-CH2-CH2-)x (-CH2-CH-)y I CN HNBR (hydrogenated nitrile butadiene rubber) Double bond Deterioration caused by ozone occurs when ozone acts on the NBR double bond to break the rubber molecules apart.

CJ1

C85 C95 CP95 NCM Symbol S Z 5 16.5 10 25.5 5 29 10 38 Stroke Bore size (mm) 2.5 NCA DBore size: 4/CJ1B4-SU4 -X 204/2.5 polyurethane tubing (TU0425) or Data Soft nylon tubing (TS0425) are used. Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

S A93 MGT MY Table unit/ Number of auto switches CY Table unit/ Auto switch S 1 pc.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

CRB1/Size: 10, 15, 20, 30

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070

Compact Electric Actuator Series LG1

How to Order G LG1 05 1 Cable length 05 5m Compatible models G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Cable compatibility table Model Manufacturer's No.

Multistage Ejector (N)ZL Series

Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type.

Large Type Vacuum Unit Series ZR

B Slotted locking type Nil Without valve unit Light/Surge voltage suppressor Nil None With light/surge voltage suppressor (solenoid valve connector type only) Pilot valve specifications Z DC: 1W type (with light: 1.05W) S With surge voltage suppressor Nil AC type Electrical entry DC: 0.45W type (with light: 0.5W) Y Nil Air operated For 24, 12, 6, 5, 3 VDC L Lead wire length 0.3m LN Without

ZSE30/ISE30

Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)

PA3000/5000/PAX1000

First find the ratio of the discharge rate for fresh water when viscosity is 15mPa s from the graph to the left. It is determined to be 48%. 2. Next, the viscosity of 15mPa s and the discharge rate of 200l/min in the required specification example are converted to the discharge rate for fresh water.