Smooth Cylinder/Low Speed Cylinder 27 13 M30 x 1.5 30.5 1/2 98 17 15 110 221 75 40 133 1/ 5 stroke 244 34 15 M36 x 1.5 34.5 3/4 106 20 17 120 241 75 40 141 1/ 5 stroke 262 The minimum stroke with rod boot is 30 mm or more.
102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244
588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 2 x M V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R T 44 E D H F F n-1/8, 1/4 OUT port (Common SUP type) IN port (Individual SUP type) (mm) n (stations) Model Dimension 2 10 3 4 5 6 7 8 9 374 388 476 494 L1 L2 L1 L2 86 100 108 126 122 136 154 172 158 172 200 218 194 208 246 264 230 244
Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520 3520 10 102 1020 10200 102000 ISO Class 9 8 83 832
RZ Foot: (L) Cushion valve Port RY LY 4 x LD CJ1 LH CJP RT X X LT LX Y Y LS + Stroke ZZ + Stroke LZ CJ2 (mm) Foot CM2 Without Air Cushion ZZ Bore size (mm) Bore size (mm) Stroke range LS X Y LD LH LT LX LY LZ RT RY RZ LS ZZ CG1 32 40 50 63 80 100 125 32 40 50 63 80 100 125 50 134 138 156 156 184 188 222 168 176 198 201 240 244 294 22 24 27 27 30 32 45 9 11 11 14 14 16 20 7 9 9 12 12 14 14
Refer to pages 240 to 244 for individual SUP/EXH and other options.
26 x 1.5 40 1/2 126 0 Bore Without gaiter With gaiter size (mm) PR U CDH10 CX H Z ZZ e f h l Z ZZ 40 10 16 10+0.058 0 15.0-0.1 -0.3 51 165 175 43 11.2 59 1/4 stroke 173 183 50 12 19 12+0.070 0 18.0-0.1 -0.3 58 183 195 52 11.2 66 1/4 stroke 191 203 63 16 23 16+0.070 0 25.0-0.1 -0.3 58 196 212 52 11.2 66 1/4 stroke 204 220 80 20 28 20+0.084 0 31.5-0.1 -0.3 71 235 255 65 12.5 80 1/4 stroke 244
With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV
1.25 35.5 1/8 26.5 2.5 73 154 10 12 10 6.6 35 54.5 40 4.5 49.4 48 22 28 67.7 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 10 (12) 14 10 6.6 40 65.5 49 4.5 58.4 56 30 30 78.7 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l ZZ H Z e f h ZZ 35 165 186 30 16 55 185 206 0.25 x Stroke 202 40 180 201 30 17 62 223 40 184 208 35 17 62 206 230 50 209 (216) 237 (244
54.5 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 10 6.6 35 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 10 6.6 40 65.5 49 4.5 56 30 78.7 4 12 30 M6 x 1 58.4 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l H Z 0.25 ZZ 186 e f h ZZ 35 165 30 16 55 185 206 Stroke x 201 40 180 30 17 62 202 223 208 40 184 35 17 62 206 230 237 (244
124 141 157 174 190 207 224 240 257 273 25 Allowable Kinetic Energy Unit: J Weight/With Auto Switch (Built-in magnet) Unit: g Bore size (mm) 12 16 20 25 Stroke (mm) Bore size (mm) Kinetic energy 0.022 0.038 0.055 0.09 5 10 15 20 25 30 35 40 45 50 Minimum Operating Pressure Unit: MPa 47 54 62 69 76 83 12 63 71 80 88 97 106 16 Bore size (mm) 12 16 20 25 122 136 149 163 176 190 203 217 230 244
.: 10 (NPT threads: 3/8 inch) Width across flats 17 M5 x 0.8 With auto drain Differential pressure type Float type With drain guide Port size A B C D E F G H J K L M N Q Model P 224 45 11 275 59 14 5.5 133 158 188 228.5 78 179.5 8.5 185 244 269 365 87 30 24 201.5 IDG3V, 3HV, 5V, 5HV IDG10V, 10HV 1/8, 1/4 263.5 7 92.5 222.5 11 102 41 35 IDG20V, 20HV 1/4, 3/8 305 IDG30V, 30HV 315 IDG50V, 50HV
L2 K K L1 N H F D B (B) C A J A V S Q Approx. 300 U 2 x M W X Approx. 280 32 25 D side Stations 1 2 3 4 5 n U side Y R 44 T T E D H (Pitch) F F n x 1/8, 1/4 OUT port (For common SUP) IN port (For individual SUP) Rc 3/8 IN port (For common SUP) OUT port (For individual SUP) (mm) n (stations) Model Dimension 10 9 374 388 476 494 8 338 352 430 448 7 302 316 384 402 6 266 280 338 356 5 230 244
Formula: L5 = 16n + 10 L3 = 16n + 20 n: Stations (Max. 20 stations) Dimensions L n 2 3 98 87.5 68 15 58 4 123 112.5 84 19.5 74 5 135.5 125 100 18 90 6 148 137.5 116 16 106 7 173 162.5 132 20.5 122 8 185.5 175 148 19 138 9 198 187.5 164 17 154 10 210.5 200 180 15.5 170 11 235.5 225 196 20 186 12 248 237.5 212 18 202 13 260.5 250 228 16.5 218 14 285.5 275 244 21 234 15 298 287.5 260 19 250
la.4a Pii aln '|4,7 psi kg/cm, xgl',rr, kPa bar kgy'cm'l Aru in 645.16 id 6.,1516 tf 0.0929 Arr md 0.616 h' crrf 0,1550 h' mt 10.765 ir En.tty ft.h t.366 fi.lb 1.356 kwr 3,6 Volum0 inr t6387 in' 16.387 lf 0.0283 It3 26.329 gal(U,S.) 3.785 Volumr mmt cm'(cc) N . m J MJ mm3 cm! (cc) mt 6.10 x 105 inr 0.0610 in' Enrgy 35.320 ff N.m 0.7375 0.0353 lf J 0.7375 o.fi12 gal (U.s.)
la.4a Pii aln '|4,7 psi kg/cm, xgl',rr, kPa bar kgy'cm'l Aru in 645.16 id 6.,1516 tf 0.0929 Arr md 0.616 h' crrf 0,1550 h' mt 10.765 ir En.tty ft.h t.366 fi.lb 1.356 kwr 3,6 Volum0 inr t6387 in' 16.387 lf 0.0283 It3 26.329 gal(U,S.) 3.785 Volumr mmt cm'(cc) N . m J MJ mm3 cm! (cc) mt 6.10 x 105 inr 0.0610 in' Enrgy 35.320 ff N.m 0.7375 0.0353 lf J 0.7375 o.fi12 gal (U.s.)
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: 300 mm H: 600 mm VZS VFS (Lead wire length) VS4 VQ7 EVS VFN (4(A), 2(B) port) (Pitch) (mm) Stations 2 3 52 43 68 59 20 340 331 L1 L2 19 324 315 18 308 299 17 292 283 16 276 267 15 260 251 14 244 235 13 228 219 12 212 203 11 196 187 10 180 171 9 164
125 Dimensions/With Female Thread Adapter: Vacuum Inlet Vertical Pad form Bellows type with groove ZP3E-T100BMl-B12 ZP3E-T100BMl-B18 ZP3E-T125BMl-B12 ZP3E-T125BMl-B18 Width across flats 24 32 93.8 Width across flats 24 32 78.6 A A 62 76.5 12 B 52.5 67 12 B 25 22 133 125 90.3 106 100 71.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-T100BMl-B12 M12 x 1.75 12 255 244
CXWM10-50 CXWM10-75 CXWM10-100 181.5 144 92 52 154 40 63 26 231.5 194 117 77 204 65 88 26 281.5 244 142 102 254 90 113 26 8-26-13 12 Series CXWM 10 Basic Type: CXWM1025 stroke 2 x 2-3.3 through 2 x 2-6.5 counterbore depth 3.2 (4H7 hole pitch) 4H7 depth 3 +0.012 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local
102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244