Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N Courtesy of Steven Engineering, Inc.-230

212

Inlet pressure: 44 psi (0.3 MPa) Fluid: Water LVR20 LVR40 LVR50 12 [45] 26 [100] 1.1 [4] 24 [90] 11 [40] 0.9 [3.5] Flow rate gal/min [L/min] Flow rate gal/min [L/min] Flow rate gal/min [L/min] 21 [80] 9.2 [35] 0.8 [3] 18 [70] 7.9 [30] 0.7 [2.5] 16 [60] 6.6 [25] 13 [50] 0.5 [2] 5.3 [20] 11 [40] 0.4 [1.5] 4.0 [15] 8 [30] 0.3 [1] 2.6 [10] 5 [20] 0.1 [0.5] 1.3 [5] 2.6 [10] 0 0 0 0 0 0 15 [0.1

AIR CYLINDER

Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5. Troubleshooting P.23 6. Construction P.26 7.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

ISG

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

VND

When fluid is exhausted from the P1 port, the valve r connected with the piston t is closed by the return spring y. When valve opens When pressurized air enters through the P1 port, the valve piston moves upward by the pilot air that enters below the piston and the valve element opens.

ITVH

ARP No load voltage [V peak] Max. current rating [A] 0 to 20 [V] 5.0 IR-A 100 IR Over 20 [V] to 30 [V] Peak voltage 2) A circuit using max. 30 [Vrms] or less (42.4 [V peak]), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 4.

XLAQ/XLDQ

Construction Auto switch (Option) Indicator (Option) Handle q Bonnet assembly (Maintenance part) (Including w, t, y, u) Magnet (Option) Pilot port u Bellows holder (Material: Stainless steel 304) e Exterior seal (Maintenance part) y Bellows (Material: Stainless steel 316L) Bellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part) r Body (Material: A6063)

Series 10-, 21- AW-B Filter Regulator

With bracket With set nut (for panel mounting) Mounting Option t + Nil G Pressure gauge b Without pressure gauge Round type pressure gauge (without limit indicator) 1079 A Series AW-B 1021Filter Regulator Series AWK-B Filter Regulator with Backflow Function 1021q Symbol Description Body size 20 40 60 30 + Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure

VNH

2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !2 is energized, the pilot air supplied to the bottom of the piston u moves upward to open the valve element A t and closes the valve element B y. Because rod !

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

ZSE30A(F)/ISE30A

(Reduce power consumption by up to 20%.)

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

Sine Rodless Cylinder Series REA

Model determination 2 Sine Rodless Cylinder Series REA Model Selection Method 2 Precautions on Design 1 Selection Method 40 32 25 500 500 300 200 300 400 Recommended driving force: Fn(N) 200 300 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable

SYA3000/5000/7000

Body ported 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With

Title not found

20 Power supply 100-240 VAC 100-240 VAC 24 VDC 100-240 VAC 24 VDC + 10% 15 % + 10% 15% + 20% 15% + 10% 15% + 20% 15% 50/60 Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100

Desktop Duster Box

Nozzle 494 RoHS Desktop Duster Box ZVB Series IZS How to Order IZN A S B ZVB 20 IZF ZVB ZVB q w e r t IZD IZE Nil None Note 1) S With photoelectric sensor Note 2) r AC adapter q Size w Additional air blow B With additional air blow e Photoelectric sensor Note 1) It is necessary to connect an external switch to the external input terminal on the back side of the product.

99

Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g