Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

/8 1/4 Piping specifications Symbol A02 A03 A04 A06 A10 B02 B03 B04 B06 Size 2 Size 3 Size 1 Horizontal 3/8 Side-ported 1/4 0.37 3/8 1/4 Side-ported 3/8 Bottom 3/8 Side-ported 1/2 3/8 Side-ported 3/4 0.68 1/2 Horizontal Side-ported 1 1.29 3/4 Bottom-ported 1/4 3/8 Bottom-ported 3/8 0.68 1/2 Bottom Bottom-ported 1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread type 3/4 Horizontal Rc Nil

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

CUJ

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

AC Servo Motor Driver (MECHATROLINK-II type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

3-Position Rotary Table

4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

RSH/RS1H

Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Weight Rod end configuration 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in shock absorber

RSH/RS1H

Rc 1/4 M5 x 0.8 Port size NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 ML2B G 1/8 G 1/8 G 1/4 G 1/4 Moantable Auto switch C J G5-S Bore Size/Standard Stroke (mm) CV MVGQ Standard stroke Bore size (mm) Model 20 15 CC RSH RS1H 32 20 50 30 RB RS1H 63 30 J 80 40 Weight D(kg) -X Bore size (mm) Action Rod end configuration Weight 2020 0.41 Data Double acting, 32 0.75 Lever type with built-in shock absorber

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Standard 1 2 3 4 5 6 7 Stainless steel Clip Stainless steel, Cu Tube assembly Class H Coil assembly Stainless steel, PTFE (FKM) Armature assembly PTFE (FKM) Seal Stainless steel Return spring Brass Body Dimensions (mm)/Bracket 1in = 25.4mm A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket mounting dimensions (mm) B C D E F G H J L A Bracket part no.

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

MY1

4 !0 !9 !8 !5 !

AC Servo Motor Driver (Pulse input type/Positioning type)

Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para. No Initial value Recommended value Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Manifold Body ported for internal pilot Type SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 Type SS5YJ3SYJ33 M5 x 0.8 M3 x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8

Air cylinder (Series compatible with secondary batteries)

(n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.

3

I (4 locations) 0.1 0.2 D G W AC (4 locations) (The dimension on the opposite side is the same.) A AA C J L L J K (4 locations) Flat washer With 4 pcs.

HRX-OM-W069

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signals 4 to 6. (1) (2) (3) Setting of contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting of contact output signal 4 to 6 No.

IDX-OM-W029

2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315