Stability of suction position,

ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-63BM Applicable pad part no. ZP3E-100UM ZP3E-80BM Part no. ZP3EA-P5 [Weight: 61.1 g] Part no. ZP3EA-P6 [Weight: 94.4 g] 16.3 58.8 16.3 72 R R 4.9 7.9 4.9 7.9 R R R R R R 81.5 66.3 Applicable pad part no.

MXH

40 Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.37 0.57 0.76 0.96 0.20 0 Yaw moment My (Nm) Pitch moment Mp (Nm) MXH16 MXH16 0.16 0.3 60 50 40 0.14 60 50 40 0.25 Displacement (mm) Displacement (mm) 0.12 0.2 0.1 25, 30 Stroke 25, 30 15, 20 5,10 0.15 0.08 15, 20 5, 10 0.06 0.1 0.04 0.05 0.02 0 0 0 0.59 0.88 1.18 1.59 0.49 0.98 1.47 1.88

33

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C.

EXxx-OMQ0015CN

2047 10.5 5.25 21 1934 5 20 1950 10 5 20 1024 3 12 1024 5.25 2.625 10.5 114 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 1950 -49No.EX-OMQ0015CN (3) AD -3276732767 = : 15 V (1)15 V (2)5000 1000 1000 1 V 2000 2 V 3000 3 V 4000 4 V 5000 5 V (3)(5 V-1 V)(5000-1000)1/1000 15 V 1/1000 3000 AD 1000 5000 PLC (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -32766 32767 10 5 5 20 20 -32767 32766

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Table of Contents

29 or less 2 position 3 position Single VQ1131 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less 57 VQ1230 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less 29 or less Double (Latching) VQ1231 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less VQ1330 Metal seal 0.67 0.13 0.16 0.73 0.13 0.17 20 or less 26 or less 40 or less Closed

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

6 Special resin MYA63-15-R6659 MYA40-15-R6658 MYA25-15-R6657 MYA16-15-R6656 Scraper !

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Wedge Cam Operation Provides

External Holding Force Internal Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa Holding force (N) 20 Holding force (N) 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 10 20 30 40 50 10 20 30 40 50 Holding point L(mm) Holding point L(mm) External hold Series MHK2 Internal hold Series MHK2 MKH2-16D MHK2-16D 50 50 Pressure 0.6MPa Pressure

5 Port Air Operated Valve Series SYA3000/5000/7000 1

A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

High Vacuum Angle Valve, XL Series

With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14). In the case of the XLFV, port P (19) is normally pressurized, and the valve (15) opens when the solenoid valve (18) is turned ON, and closes when it is turned OFF. Operation is the same as that of the XLF.

ZX

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned this catalog, and refer to page 13-1-5.

Profi-E

EX. ) To set pressure at 0. 3M Pa by I TV203*( f or 0. 5M Pa t ype) O ut put condi t i on can be m oni t ored by readi ng t he dat a of I area or di agnost i c area.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1