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Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 3 2 Calculate corrected air flow by using A or B and C.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38

1 2 1 1 2 2 3 1 1 1 1 1 1 4 267.3 18

Note 2) The wiring specification is positive common only. 1 Series VV061 Unit Manifold Specifications Fluid Air Operating pressure range (MPa) Standard 0 to 0.7 High flow type 0 to 0.3 1(P) port 3(R) port Vacuum specification (MPa) Standard 100 kPa to 0.6 100 kPa to 0 High flow type 100 kPa to 0.2 100 kPa to 0 Ambient and fluid temperature (C) 10 to 50 (No freezing) Response speed (ms) Note

Fig. a Fig. b Double Single Double Double Double Single Double Double 1 No. 0 2 4 6 Side A No. 5 Side A 0 2 3 Input block SI unit Tie-rod (2 pcs.) accessory 3 4 Station Station 1 2 3 4 1 2 3 4 7 2 No. 1 3 5 7 Side B No. 1 4 6 Side B Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898

Node address SW1 SW2 SW3 SW4 Node address SW1 SW2 SW3 SW4 0 0 0 0 0 8 0 0 0 1 1 1 0 0 0 9 1 0 0 1 2 0 1 0 0 10 0 1 0 1 3 1 1 0 0 11 1 1 0 1 4 0 0 1 0 12 0 0 1 1 5 1 0 1 0 13 1 0 1 1 6 0 1 1 0 14 0 1 1 1 7 1 1 1 0 15 1 1 1 1 0: OFF 1: ON Set the node address so that it does not duplicate the node address of other slaves.

Setting using System Manager 1. Copy the XML file *1 for this unit to the following folder: C:TwinCATloEtherCAT (this path is valid only when the default setting is kept.) Start up the TwinCAT System Manager after copying. 1: The XML file for this product can be found on the SMC website (URL http://www.smcworld.com). 2. Network setting 2-1. Off-line manual configuration method 2-1-1.

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

s b l t h g i e W ) 7 . 0 ( 4 5 . 1 ) 1 . 1 ( 3 4 . 2 ) 5 . 2 ( 1 5 . 5 ) 5 . 4 ( 2 9 . 9 t e k c a r B P 4 2 B P 5 2 B e g u a G 5 2 O R A N . d t S ) g i s p 0 6 1 ~ 0 ( n o i t p O K50A-MP1.0-N02M K50A-MP2.0-N02M 5 3 O R A N . d t S ) g i s p 0 3 ~ 0 ( How To Order N R NAR 4 25 02 B Body size Option 4 1/2 6 1 8 11/2 9 2 Nil None R IN-OUT Reversal (RightLeft) Pressure regulating range

(mm) (Nm) 6 7.3 0.02 100 10 6.0 0.05 100 15 4.5 0.15 200 20 3.7 0.20 300 25 3.7 0.25 300 32 3.1 0.40 400 Fig.6-2 Non-rotation accuracy direction 40 2.8 0.62 400 50 2.4 1.00 500 63 2.2 1.37 500 Note 1) Avoid usage where max. allowable moment is exceeded. In that case, use external guide together.

When 1 digit = 1 kPa, the pressure is given with an increment of 1 kPa, e.g., 1, 2, 3, , 99, 100. Digit (Min. setting unit) E One of the switch output types, and means the operation in which a switch is turned on when pressure equal to the switch output set value or less is detected.

Example wiring is shown in the figure b. : Bit status 0 and 1 in the data corresponds to solenoid valve status OFF and ON (0: OFF, 1: ON), and the output number starts at zero from LSB (least significant bit). -19No.EX-OMM0008-D Mounting of Objects This SI unit covers the CompoNetTM object classes below.

Cylinder Stroke Standard stroke (mm) Manufacturable stroke range 25 50 75 100 Model CEP1B12 1 to 150 CEP1B20 1 to 300 Strokes other than standard strokes are available upon request for special. Consult with SMC separately. 648 A

Pressure range Switch 100 kPa 0 0.5 MPa 10 MPa 15 MPa 0.4 MPa 1 MPa 0 1 MPa For 1 MPa (For Air) ISE70 100 kPa (0.1 MPa) 1 MPa For 10 MPa (For General Fluids) 10 MPa 0 ISE75 10 MPa 0.4 MPa For 15 MPa (For General Fluids) 0 15 MPa ISE75H 0.5 MPa 15 MPa The ISE75(H) switch shows zero (0) when the pressure being applied goes below the lower limit of the set pressure range, when the cut-too-zero

Air Cylinder Double Acting, Single Rod JMB Series 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 How to Order With auto switch JMDB 32 50 M9BW B With auto switch (Built-in magnet) Not available without magnet Number of auto switches Nil 2 S 1 3 3 n n Mounting B Basic Auto switch Bore size Nil Without auto switch 32 32 mm 40 40 mm 45 45 mm 50 50 mm 56 56 mm 63 63 mm 67 67 mm 80 80 mm 85 85 mm 100

to 200 kPa) Supply pressure 100 to 200 kPa) 0.01 mm or less 0.01 mm or less Hysteresis *1 (Detection distance range (Detection distance range 0.01 to 0.15 mm) 0.3 to 0.15 mm) LED level meter (Red: 1, Green: 2) Indicator light (Set value < Actual distance: Red, Set value = Actual distance: Green 1, Set value > Actual distance: Green 1 + Green 2) Enclosure IP66: without pressure gauge IP40

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 26.1 3 R, NPT1/8 13.6 18.3 26.1 Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

Relationship Between Flow Rate and Pressure Difference (Representative values) 100 [Inrush] 90 80 70 60 50 40 30 20 10 0 0 0.05 0.1 0.15 0.2 0.25 Pressure difference [MPa] Flow rate [L/min (ANR)] Rated voltage SX090 [Holding] SX91 1 2 35% (SX090) 42% (SX9 ) of rated voltage 0 V SX92 100 10 ms T1 (ON) (2 s or more) T2 (OFF) Energized condition 1 Low Profile 2/3-Port Solenoid Valve SX90/090