Series AP500

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port with sub-plate M5 3 position closed center JIS Symbol

5 Port Air Operated Valve Series VFA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Foot bracket Mounting bracket are supplied, but unattached.

ISE70/75/75H

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Functions Error function Display calibration function Take the following corrective solutions when error occurs.

ZSE40/ISE40

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4. Selection of response time 5. Setting Auto/Manual SET SET SET Press the SET button. Press the SET button. Press the SET button to complete the setting.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20

VSA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 Rc 3 position exhaust center 1 4 1 8 Rc 0.86 VR 1 8 Rc Note) The table shows the valve without sub-plate. With sub-plate: Add 0.24 kg VH Specifications Large flow capacity.

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

Compact Manometer Series PPA 1

AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Maintenance and Other Warning AMR 1. Perform maintenance and inspection on a regular basis.

PSE540/560

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Pads can be directly mounted. ISA2 Manifolding is possible.

ZSE3/ISE3

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF For details about certified products conforming to international standards, visit us at www.smcworld.com. Data Push-button calibration allows for precise and simple set up.

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Selection Selection Selection Selection Selection Warning 1. Check the specifications.

Series AK1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

KT10

How to Order Port Number e r KT10 R C 4P 4 1 0 0 Installation option Delivery pressure Code Installation Panel installation Delivery pressure Code 5 to 500 psig (0.034 to 3.4 MPa) 5 to 800 psig (0.034 to 5.5 MPa) 10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) 1) No code

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Port size Type of actuation Nil Without sub-plate VH Normally open Normally closed 2 1 M5 port with sub-plate M5 VHS How to Order Manifold Base Same manifolds as Series SYJ300 are prepared. SS3YJA3 Fill the same as SS3YJ3.

TA301

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold Model Model VOA301 Applicable manifold model Common/lndividual exhaust Accessory (Part no.)

VFRA3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold