.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Manifold capable Rich line-up AMR VVEXB/Rc 1/8Up to 10 stations VVEX2/Rc 1/4Up to 8 stations Port sizes available from M5 to Rc 2, most flow rates and pipes can be accommodated.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil F N T Rc G NPT NPTF VR Body type Body ported Base mounted 2 4 Port size VH Valve option VPA342 VPA344 VPA542 VPA544 VPA742 VPA744 Port size Rc Without sub-plate 1/8 1/4 3/8 1/2 Symbol Nil V Standard Vacuum VPA544 VHS Nil JIS Symbol Option Option

V100

[Standard] Press in the direction of the arrow Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector Socket Lead wire Caution Hook When operating with a screwdriver, turn it gently using a watchmakers screwdriver.

PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to 4 l/min (PF2D504) 1.8 to 20 l/min (PF2D520) 4.0 to 40 l/min (PF2D540) ISA2 IS ZSM Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Series AP500

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

4/5 Port Air Operated Valve Series SYJA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port with sub-plate M5 3 position closed center JIS Symbol

5 Port Air Operated Valve Series VFA3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Foot bracket Mounting bracket are supplied, but unattached.

ISE70/75/75H

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Functions Error function Display calibration function Take the following corrective solutions when error occurs.

ZSE40/ISE40

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4. Selection of response time 5. Setting Auto/Manual SET SET SET Press the SET button. Press the SET button. Press the SET button to complete the setting.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20

VSA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 Rc 3 position exhaust center 1 4 1 8 Rc 0.86 VR 1 8 Rc Note) The table shows the valve without sub-plate. With sub-plate: Add 0.24 kg VH Specifications Large flow capacity.

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

Compact Manometer Series PPA 1

AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VEX Maintenance and Other Warning AMR 1. Perform maintenance and inspection on a regular basis.

PSE540/560

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Pads can be directly mounted. ISA2 Manifolding is possible.

ZSE3/ISE3

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF For details about certified products conforming to international standards, visit us at www.smcworld.com. Data Push-button calibration allows for precise and simple set up.

Safety Instructions

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Selection Selection Selection Selection Selection Warning 1. Check the specifications.

Series AK1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.