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40 57 80 100 27 54 85 2.5 6 12 25 50 75 125 125 150 190 2.65 3.88 6 8.48 10.59 0.35 0.88 1.77 3.53 7.06 10.59 17.66 21.19 26.49 35.31 Comes with pre-filter mist separator AFM, and micro mist separator AFD.

VEA

Fluctuation to temperature VEA252 0 to 50C Operating temperature range 25 to 85% Relative humidity range 2 G (Amplitude: 0.4 mm, 50 Hz) based on JIS C 0911 II Class E4 Vibration resistance No condensation, Relative humidity: 25 to 85% Storage conditions 0.11 kg Weight With Malfunction Detection Circuit: VEA251 (Same main features as VEA250) VEA250 Detection capabilities Breakage of output

IDX-OM-W017

IDX-OM-W017-E / Series IDFA3E-23-A,C IDFA4E-23-A,C,L,R,T,V IDFA6E-23-A,C,K,L,R,T,V IDFA8E-23-A,C,K,L,R,T,V IDFA11E-23-A,C,K,L,R,T,V IDFA15E1-23-A,C,K,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO 4414: Pneumatic fluid power General rules and safety requirements for systems and

AME

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Rotary Table Series MSQ

MSQB1A(Size:1) Rotary Table Rotary Table Series MSQ Size:1, 2, 3, 7 Compact and light weight design Compact and light weight design Coming out in September, 2001 A Size Weight(g) Model 70 105 150 250 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A B mm Size Model A B C D 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A 50.5 56 60 73.5 28 30 34.5 41 25 28 30.5 34.5 16 18 20.5 23 C D Scale :100% (MSQB1A) Flexible

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Series 10/11-C(D)G1, available for clean environment, prevent particle generation in a clean room. Series 21/22-C(D)G1 offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted.

Size: 16, Bearing Type: L ( Ball Bushing Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 30mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC): AP (LECPA, Pulse Input Type, PNP

The part number is "C(D)QS□-Stroke-Special order part number" or “C(D)QS□-Special order part number-Stroke."

② Simple specials product
When changing the tip of the rod applies to the XA□, there will be a special part number such as CQS12-AXL02-5, etc.
The SMC sales office that received the order via the https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=actuators&fa_id=10084