Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9P, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: M9P, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: M8 3-pin, Specification: Standard type

Range(MPa): 0.1～1, Connection port location: Symmetrical type, Switch: M9PW, Lead wire(m): 0.5, Number Of Switches: 2 pcs., Port types: M5, Connector Type: None, Specification: Made to order specifications

Range(MPa): 0.1～1, Connection port location: Standard type, Switch: Without auto switch (built-in magnet), Lead wire(m): None, Number Of Switches: None, Port types: M5, Connector Type: None, Specification: Made to order specifications

Range(MPa): 0.1～1, Connection port location: Symmetrical type, Switch: Without auto switch (built-in magnet), Lead wire(m): None, Number Of Switches: None, Port types: M5, Connector Type: None, Specification: Made to order specifications

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00039, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00039, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00025, Operating

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00025, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00039, Operating

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00039, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00025, Operating

Oscillation Angle A: [180°] 180°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.00025, Operating

PSxx-OML0002CN

F.S.=514[V] 1F.S.40.010.04[V] F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF (29 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () NPN () () ()()( ) () -11No.PS-OML0002CN-G ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(K)+1(M)) 4.995(V)0.555 V ) 29 ON-OFF ON () (P1LP1H P2LP2H)ON (29 ) () "digit" () 0 () SI ONOFF () "()"

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

MHY2/MHW2

-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 +0.030 0 4H9 Depth 4 2-M4 X 0.7 2-M5 X 0.8, 10 deep (Thread for mounting attachment) 8 10 0.005 0.025 (Mounting thread) 5 9 2-5.5 (Mounting hole) 2-M5 X 0.8 Depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 MHZ2 21H9 Depth 1.5 +0.052 0 Postioning pin hole 51 MHZJ2 16 69 26 MHQ 86

3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

IDX-OM-M051

Rear Ball valve Test button Flush button Option: V Heavy-duty IDF100F auto drain Check the operation once a day. Option: V IDF125F Option: V IDF150F Enlarged view of part B IDF100F~150F-W 1.3 Name and function of parts 1 5 IDX-OM-M051 Air Dryer 1. Name and Function of Parts Layout of parts on front panel Controller Refer to 3.6 for checking operation.

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions