EX600-SDNA_eng

(BUS OUT and PCI) 12 11 10 9 8 6 5 3 1 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm. DIN rail mounting (Available for series other than SY series.

EX600-SPRA_eng

Mounted on to unused connectors (BUS OUT and PCI). 12 11 10 9 8 6 5 3 1 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm. DIN rail mounting (Available for series other than SY series.

EX600-SMJ_eng

(BUS OUT and PCI) 12 11 10 9 8 6 5 3 1 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm. DIN rail mounting (Available for series other than SY series.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Floating Joint/Stainless Steel Type Series JS

U 0.5 B C D E F G H J M A Max. screw-in depth P Model JS10-4-070 8.5 9.5 12 1.5 4 4 7 14.4 4.7 80 M4 x 0.7 26 JS16-5-080 12 13.5 16 2 6 5 10 19 5.8 0.5 210 M5 x 0.8 34.5 JS20-8-125 M8 x 1.25 44 15.5 21 4.5 7 7.8 13 24.8 7.3 0.5 1100 JS32-10-125 M10 x 1.25 49.5 17.5 24 5 8 8.5 17 29 8.5 0.5 2500 JS40-14-150 M14 x 1.5 60 18.5 31 5 11 11.6 22 38.4 11.6 0.75 6000 JS63-18-150 M18 x 1.5 74.5

Miniature Guide Rod Cylinder Series MGJ

Operation outside of this range may cause excessive impact, which may result in the damage to the devices. 6 10 Bore size (mm) 6 Operating piston speed (m/s) 0.05 to 0.5 L Allowable kinetic energy (J) 0.012 0.035 100 5st 10st 15st W 100 80 Load weight W (g) 10 10 60 6 Load weight (kg) L 40 1 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) 10 300 5st

5 Port Solenoid Valve Series SQ1000/2000

4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3, C4, C6 A, B port 43.5 58 P = 11.5 Dimensions Formulae L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

How to Order Manifold Assemblies (Example) How to Order Valves Example (SZ3000, positive common with power supply terminals) SZ3 5 1 C6 LOZ 60 Double solenoid SZ3260-5LOZ-C6 (3 sets) Single solenoid SZ3160-5LOZ-C6 (2 sets) Type of actuation Supply/Exhaust block (U side mounting) 1 2 3 4 5 A B C 2 position single solenoid 2 position double solenoid 3 position closed center Switch specifications

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water

New

Built-in M5 x 0.8 Built-in regulator EXH Breathing hole regulator EXH Solenoid valve EXH 1/4 (Rc, NPT, G) EXH port 43 24 36 24 55 EXH OUT SUP 27 3/8 (Rc, NPT, G) SUP port 3/8 (Rc, NPT, G) OUT port 36 36 4 x M5 x 0.8 depth 11 Bracket mounting hole With L-bracket With flat bracket 100 84 4 x 7 40 52 Flat bracket 1/4 (Rc, NPT, G) EXH port 3/8 (Rc, NPT, G) OUT port 1/4 (Rc, NPT, G) EXH port 3

Hydraulic Filters

11 M8 x 25 56 260 1.8 27.7 110 80 133 177 44 70 11 M8 x 25 70 290 2.7 34.5 43.2 128 95 185 234 49 86 15 M10 x 30 86 340 4.6 49.1 61.1 152 110 214 268.5 54.5 100 15 M12 x 35 102 370 6.1 77.1 9.5 176 125 220 290.5 70.5 120 15 M12 x 35 130 410 90.0 8.0 102.6 14.0 224 155 280 364.5 84.5 150 15 M16 x 40 166 490 115.4 13.5 501

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Rodless Cylinder for Vacuum Series CYV ø15, ø32

83 R 45 79.5 T 30 34 TA 20 22.5 TB 15 22 TC 0.5 0.5 W 69 115 Y 2.5 3.5 Z 132 165 Model CYV15 CYV32 Note) Refer to Cushion Effect (Sine Cushion) and Stroke Adjustment under Specific Product Precautions on page 8-18-11. 8-18-9 Series CYV Specific Product Precautions 1 Be sure to read before handing.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Ambient and fluid temperature (C) 0 to 60 Lubrication (1) Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF.

AME

76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

AT ID 1 Standard 11 2 Standard Accessory (Option) AMG Description Bracket Symbol Nil Rc Thread type Nil AFF B JIS Symbol F G N NPT N.C. auto-drain C AMG N.O. auto-drain D AM Refer to the table below for accessory/Option combinations. Port size Misc.

AMH

series. 14-20-30 2 Micro Mist Separator with Prefilter Series AMH How to Order AMH150 to AMH850 AMH 250 03 J B Option Body size Accessory (Option) 1 4 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 J Drain guide B female thread R IN-OUT reversal direction Symbol Description Bracket T Element service indicator Nil B N.C. auto-drain C 1 Standard 11

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

PA 25 50 P 5/16-24 UNF 7/16-20 UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to Cushion Effect (Sine Cushion) and Stroke Adjustment under Specific Product Precautions on page 8-18-11. 8-18-9 9 Series CYV Specific Product Precautions 1 Be sure to read before handing.

ARM10/11 series is a compact manifold regulator with integrated pressure gauge with adjustable limit indicator.  ARM10/11 series is available as individual and manifold type.  Check valve equipped as standard.