LX Series Compact Electric Actuators

Duty rrtb = (t + 1 + 0,8)/ (1 + 0.9 + 1 + 0,8+10 X 100 = 50% ..Possible to us, @ Operation Sloppage Figure 2 Duty ratio: (4 + 3)/ (4 +0,2+3 +2DX 100 = 75% '.Not possiblc to use, Senies Ufi tleilnic Artuilo lfifiBli[ It|onoil lllMmce Table receives moment from each direction accordino to cenler of gravity ot work. Overhang ot work should be within the range shown in the figures below.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

PFxx-OMS0001CN

ON [ooo]1 OFF 30msec.() [ooo] -47No.PF-OMS0001CN-A [F22] 5V 20mA [---] <> [F22] [FRE][] [FrE] [] ON OFF [oFF] [oN] [F_H] [] [mA] [V] 5 V 20 mA 10% 10% 100% [F22] 500 L/min -48No.PF-OMS0001CN-A [F30] 2 5 OFF ()100 24 551005009.5 221002003.8 <> [F30] [SAVE][] [SAvE] [] 2 5 [F30] 2 5 OFF B OFF -49No.PF-OMS0001CN-A [F31] <> [F31] [PoS][] [PoS] [] () () [PrS] [] 0.4MPa 0.6MPa

25

Relationship between the kinematic viscosity 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Transfer is possible up to about 100 mPas.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

They can be ordered in multiples of 10 pieces.

CEx-OMQ0013

40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%

Digital Flow Switch

to 1000 L/min 20 to 2000 L/min Instantaneous flow 5 to 525 L/min 10 to 1050 L/min 20 to 2100 L/min Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Every 2 minutes or every 5 minutes Rated pressure range 0 to

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

SI unit for DeviceNet ®

Thick line Thin line Item Signal Power Signal Power Conductor area 0.82 mm2 1.65 mm2 0.20 mm2 0.33 mm2 Color Blue, White Red, Black Blue, White Red, Black Impedance 120 10% (1 MHz) 120 10% (1 MHz) Propagation delay 1.36 ns/ft (max.) 1.36 ns/ft (max.) 0.13 db / 100 ft@125 KHz (max.) 0.25 db / 100 ft@500 KHz (max.) 0.36 db / 100 ft@1 MHz (max.) 0.29 db

Mechanically Jointed Rodless Cylinder Series MY1

Wide variations from 10 to 100 Series MY1C Series MY1H Cam Follower Guide type High Precision Guide type Small and medium sizes 10 to 40 are ideal for pick & place. High precision type Makes smooth operation possible even with an off-set load.

Fieldbus system DeviceNet TM compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

Digital Flow Switch (Integrated display type)

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

HRX-OM-M005

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

Shock Absorbers and Rate Controls

DA N4odels wi function at 10%oitheir maximum rated enerS/ percyce.lilessthan 10%, a snia ler modelshoud bespecned. 2. Prov de a positile stop 3nm before end of stroke in tension and cgr.pression to prevent nternal bottoming. 3.

Copper-free Actuators

Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 Series/Variation Floating joint Series JA 5.2-2 SJAl JA Standard For compact cylinder SJBl 5.2-10 JB RB Shock absorber/ Series RB J 5.1-2 SRBl 20-RB O.D. thread M8/M10/M14/M20/M27 D 5.1-7 SRBLl 20-RBL O.D. thread M10/M14/M20/M27 -X 20Technical Data 5.5-5 6, 10, 16, 20, 25, 32, 40, 50, 63, 80,

α PneuAlpha HARDWARE MANUAL

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5

39

2 mm 10% Supply voltage 10 to 30 VDC 10 to 30 VDC Output N.O., PNP N.O., PNP Continuous load current 150 mA 100 mA Response frequency 30 Hz 25 Hz Housing material PBT PA6, PBT Clamping side: Red Clamping side: Red Output indication Unclamping side: Yellow Unclamping side: Yellow Voltage indication Green Green Note) Switch specifications are corresponding to manufacturers technical information